Heat-bonding apparatus and method of manufacturing heat-bonded products
A heat-bonding apparatus and method of manufacturing a heat-bonded product without overheating during cooling thereof after the completion of the heat-bonding, where the object can be cooled in a shorter time than the conventional when the heat-bonding is performed in a vacuum. A heat-bonding apparatus having a vacuum chamber for housing an object to be heat-bonded and a buffer part, a heater for applying heat to the buffer part placed into contact with the object, an object temperature sensor for detecting a temperature of the object heated through the buffer part, a buffer temperature sensor for detecting a temperature of the buffer part, a vacuum breaker for breaking the vacuum, and a controller for operating the vacuum breaker to break the vacuum when a temperature difference between a temperature detected by the object temperature sensor and a temperature detected by the buffer temperature sensor falls within a range of specified temperature difference.
1. A heat-bonding apparatus comprising:
a vacuum chamber for housing an object to be heat-bonded and a buffer part;
a heater for applying heat to the buffer part placed into contact with the object housed in the vacuum chamber;
an object temperature sensor for detecting a temperature of the object heated through the buffer part;
a buffer temperature sensor for detecting a temperature of the buffer part;
a vacuum breaker for breaking a vacuum in the vacuum chamber; and
a controller for operating the vacuum breaker to break the vacuum in the vacuum chamber when a temperature difference between a first detected temperature of the object temperature sensor and a second detected temperature of the buffer temperature sensor falls within a range of specified temperature difference.
2. The heat-bonding apparatus of claim 1 ,
wherein the controller is configured to lower the temperature of the object below a melting point of a bonding material after breaking the vacuum in the vacuum chamber.
3. The heat-bonding apparatus of claim 1 , further comprising:
a vacuum pump for discharging air inside the vacuum chamber,
wherein the controller is configured to control so that the object is prevented from being overheated through adjustment of heat transfer from the buffer part to the object by adjusting air discharge with the vacuum pump and vacuum break with the vacuum breaker in combination.
4. The heat-bonding apparatus of claim 1 , further comprising:
a vacuum pump for discharging air inside the vacuum chamber,
wherein the controller is configured to control the temperature difference between the first detected temperature and the second detected temperature to fall within the range of specified temperature difference through adjustment of heat transfer from the buffer part to the object by adjusting air discharge with the vacuum pump and vacuum break with the vacuum breaker in combination.
5. The heat-bonding apparatus of claim 1 ,
wherein the buffer part is provided as a placing table for placing the object thereon, and the heater is provided inside the placing table.
6. A method of manufacturing a heat-bonded product, comprising the steps of:
providing the heat-bonding apparatus of claim 1 ;
placing to load the object to be heat-bonded in contact with the buffer part into the heat-bonding apparatus; and
heat-bonding the object using the heat-bonding apparatus.
7. A method of manufacturing a heat-bonded product, comprising the steps of:
placing an object to be heat-bonded and a buffer part under vacuum, the object being arranged into contact with the buffer part;
heating the buffer part under vacuum;
detecting a first temperature of the object heated through the buffer part;
detecting a second temperature of the buffer part;
breaking the vacuum when a temperature difference between the first temperature detected by the first temperature detecting step and the second temperature detected by the second temperature detecting step falls within a range of specified temperature difference.