Method for producing a microscreen
View Patent ↗A method produces a microscreen by providing a support and applying a photoresist layer with a definable thickness to the support. The photoresist is exposed by radiation using a mask that defines the structure of the microscreen. The photoresist is then developed. The thickness of the photoresist layer is selected such that, in a sub-region of the photoresist layer, the radiation used for the exposure penetrates only so slightly that practically no cross-linking of the photoresist takes place.
1. A process for producing a microsieve, comprising:
providing a carrier;
applying a photoresist layer to the carrier;
exposing the photoresist layer to radiation using a mask to thereby selectively crosslink the photoresist layer, the mask defining a structure of the microsieve; and
developing the photoresist,
wherein the photoresist layer has a thickness on the carrier, such that a subregion of the photoresist layer is defined, the radiation used for exposure penetrating into the subregion of the photoresist layer only to such a minor degree that substantially no crosslinking takes place in the subregion of the photoresist layer,
when developing the photoresist layer, at least one anchoring structure is produced, and
the microsieve produced from the photoresist layer remains adhered to the carrier via the at least one anchoring structure, after the photoresist layer has been developed.
2. The process as claimed in claim 1 , wherein
a penetration depth of the radiation used for exposure is defined as a depth in the photoresist layer at which a radiation intensity has been halved, and
the thickness of the photoresist layer is chosen to be at least as great as the penetration depth of the radiation used for exposure.
3. The process as claimed in claim 2 , wherein the thickness of the photoresist layer is at least twice as great as the penetration depth of the radiation used for exposure.
4. The process as claimed in claim 1 , wherein
a penetration depth of the radiation used for exposure is defined as a depth in the photoresist layer at which a radiation intensity has been halved, and
the photoresist layer is formed from a material and applied with a process such that the penetration depth is not more than 1 μm when the photoresist layer is exposed to the radiation.
5. The process as claimed in claim 1 , wherein the thickness of the photoresist layer is between 1 μm and 20 μm.
6. The process as claimed in claim 1 , wherein the thickness of the photoresist layer is between 1 μm and 5 μm.
7. The process as claimed in claim 1 , wherein when developing the photoresist layer, a developer fluid does not undermine the subregion of the photoresist layer where the at least one anchoring structure is to be formed.
8. The process as claimed in claim 1 , wherein the carrier is formed of a silicon wafer or a glass plate.