Miniaturized multi-part component and method for producing same
A component includes a carrier and a functional structure on the carrier. A thin-film cover covers the functional structure and is used as a mounting base for a circuit part, which is arranged over the thin-film cover. The circuit part is connected to the functional structure by means of a lead.
1. A component, comprising
a carrier;
a plurality of functional structures on the carrier;
a plurality of thin-film covers, each of the plurality of thin-film covers being over a different one of the plurality of functional structures, wherein the plurality of functional structures comprises a microelectromechanical system (MEMS) structure, a microacoustic structure, a surface acoustic wave (SAW) structure, a bulk acoustic wave (BAW) structure, and a guided bulk acoustic wave (GBAW) structure; and
a circuit part over one of the plurality of thin-film covers, wherein the circuit part is connected to a functional structure of the plurality of functional structures by a lead.
2. The component according to claim 1 , wherein
the circuit part comprises an element selected from a group of elements consisting of an inductive element, a capacitive element, a resistive element, and a surface-mount device (SMD) with an active circuit element.
3. The component according to claim 1 , further comprising a connection pad on the carrier, the connection pad being connected to the lead such that the functional structure of the plurality of functional structures is connected to the circuit part by the connection pad.
4. The component according to claim 1 , further comprising a plurality of further functional structures on the carrier.
5. The component according to claim 4 , wherein one of the plurality of thin-film covers covers the plurality of further functional structures together with the functional structure of the plurality of functional structures.
6. The component according to claim 4 , further comprising one or more further thin-film covers covering the plurality of further functional structures.
7. The component according to claim 1 , wherein:
the plurality of functional structures are connected to a radio-frequency (RF) filter; and
the circuit part is an impedance matching element for the RF filter.
8. The component according to claim 7 , wherein the component comprises a transmission filter, a reception filter or a duplexer for use in a mobile communication device.
9. The component according to claim 1 , wherein the circuit part is a thin-film resistor that comprises titanium nitride or tantalum nitride.
10. The component according to claim 1 , wherein the circuit part is a thin-film capacitor with a dielectric between two conductive layers.
11. The component according to claim 1 , wherein the circuit part vertically overlies the functional structure of the plurality of functional structures.
12. The component according to claim 1 , wherein the circuit part is laterally spaced from the functional structure of the plurality of functional structures.
13. A method for producing a component, the method comprising:
arranging a plurality of functional structures on a carrier;
covering each of the plurality of functional structures with a different one of a plurality of thin-film covers, each of the plurality of thin-film covers being over a different one of the plurality of functional structures;
forming a circuit part on one of the plurality of thin-film covers, wherein the plurality of functional structures comprises a microelectromechanical system (MEMS) structure, a microacoustic structure, a surface acoustic wave (SAW) structure, a bulk acoustic wave (BAW) structure, and a guided bulk acoustic wave (GBAW) structure; and
electrically connecting the circuit part to a functional structure of the plurality of functional structures.
14. The method according to claim 13 , wherein forming the circuit part comprises depositing a metal layer on the one of the thin-film covers and structuring the metal layer.
15. The method according to claim 14 , wherein depositing the metal layer simultaneously forms a metal for a conductive contact between material of the circuit part and a lead to the functional structure of the plurality of functional structures.
16. A component, comprising:
a carrier;
a plurality of functional structures on the carrier, wherein each functional structure comprises a structure selected from the group consisting of a MEMS structure, a microacoustic structure, a SAW structure, a BAW structure, and a GBAW structure;
a plurality of thin-film covers, each thin-film cover overlying at least one of the functional structures, wherein the plurality of functional structures comprises a MEMS structure, a SAW structure, a BAW structure, and a GBAW structure, each of the plurality of functional structures covered by a different thin-film cover; and
a circuit part overlying one of the thin-film covers and being electrically connected to a functional structure of the plurality of functional structures, wherein the circuit part comprises an element selected from the group consisting of an inductive element, a capacitive element, and a resistive element.
17. The component according to claim 16 , wherein the circuit part comprises a coil that overlies each of the different thin-film covers.