Thermal type air flow sensor
View Patent ↗In order to provide a thermal flow sensor having high measurement accuracy, the thermal type air flow sensor includes a flow detecting unit, a sub passage on which the flow detecting unit is disposed, and an LSI to which a signal obtained by the flow detecting unit is input and which outputs a signal to the outside. A side wall of the sub passage is disposed between the flow detecting unit and the LSI, or on the LSI. A diffusion resistor provided inside the LSI has its longitudinal direction in parallel with a <100> orientation of single-crystal Si.
1. A thermal type air flow sensor comprising: a flow detecting unit;
a sub passage in which the flow detecting unit is disposed and the sub passage is configured to guide air flowing through a main passage to the flow detecting unit; and
an LSI to which a signal obtained by the flow detecting unit is input and which outputs a signal;
wherein a side wall of the sub passage is disposed on a resin covering the flow detecting unit and the LSI, and the side wall is disposed: (i) between the flow detecting unit and the LSI or (ii) on the LSI,
wherein the side wall of the sub passage is formed by a side wall of a holding section, the holding section being configured to hold the flow detecting unit in the sub passage by a first part of the holding section arranged above the flow detecting unit and by a second part of the holding section arranged below the flow detecting unit, and
wherein resistor bodies provided in an A/D converting circuit which converts the signal from the flow detecting unit inside the LSI are disposed so that respective first ends of a plurality of the resistor bodies are at a first distance from the side wall of the sub passage laterally to one side of the holding section, and so that respective second ends of the plurality of resistor bodies are disposed at a second distance from the side wall of the sub passage and to said one side of the holding section and laterally to said one side of the holding section.
2. The thermal type air flow sensor according to claim 1 ,
wherein the resistor bodies include diffusion resistor bodies that are formed of polysilicon.
3. The thermal type air flow sensor according to claim 1 ,
wherein the LSI is formed of single-crystal Si and the resistor bodies provided in the A/D converting circuit which converts the signal from the flow detecting unit the LSI include diffusion resistor bodies having longitudinal axes positioned in a direction parallel relative to a <100> orientation of the single-crystal Si of the LSI.
4. The thermal type air flow sensor according to claim 3 ,
wherein the resin is a thermosetting resin.
5. The thermal type air flow sensor according to claim 3 ,
wherein the sub passage is molded using a thermoplastic resin.
6. The thermal type air flow sensor according to claim 3 ,
wherein the LSI is buried in the resin.
7. The thermal type air flow sensor according to claim 3 ,
wherein the side wall of the sub passage is directly disposed on the resin covering the flow detecting unit and the LSI.
8. The thermal type air flow sensor according to claim 3 ,
wherein the resin covering the flow detecting unit and the LSI is fixed by the side wall of the sub passage at the same time of forming the sub passage.
9. The thermal type air flow sensor according to claim 3 ,
wherein the resin covering the flow detecting unit and the LSI is fixed on sides of both the flow detecting unit and the LSI.
10. The thermal type air flow sensor according to claim 4 ,
wherein the holding section and the plurality of resistor bodies have a positional relationship such that the first distance is substantially the same for the plurality of resistor bodies and the second distance is substantially the same for the plurality of resistor bodies.
11. The thermal type air flow sensor according to claim 1 ,
wherein the resin is a thermosetting resin.
12. The thermal type air flow sensor according to claim 1 ,
wherein the sub passage is molded using a thermoplastic resin.
13. The thermal type air flow sensor according to claim 1 ,
wherein the LSI is buried in the resin.
14. The thermal type air flow sensor according to claim 1 ,
wherein the side wall of the sub passage is directly disposed on the resin covering the flow detecting unit and the LSI.
15. The thermal type air flow sensor according to claim 1 ,
wherein the resin covering the flow detecting unit and the LSI is fixed by the side wall of the sub passage at the same time of forming the sub passage.
16. The thermal type air flow sensor according to claim 1 ,
wherein the resin covering the flow detecting unit and the LSI is fixed on sides of both the flow detecting unit and the LSI.
17. The thermal type air flow sensor according to claim 1 ,
wherein each of said plurality of resistor bodies includes one of the first ends and one of the second ends.
18. The thermal type air flow sensor according to claim 1 ,
wherein the holding section and the plurality of resistor bodies have a positional relationship such that the first distance is substantially the same for the plurality of resistor bodies and the second distance is substantially the same for the plurality of resistor bodies.