Thermal type flowmeter
View Patent ↗In order to provide a method of manufacturing a thermal type flowmeter that is capable of reducing deformation of a semiconductor chip, which is caused by molding, a method of manufacturing a thermal type flowmeter is provided that includes a circuit package of a resin-molded semiconductor chip. The method includes resin-molding the semiconductor chip in a state in which a mold is pressed against a heat transfer surface that is provided on a surface of the semiconductor chip and a pressed surface that is set on the surface of the semiconductor chip at a position separate from the heat transfer surface.
1. A method of manufacturing a thermal type flowmeter that includes a circuit package of a resin-molded semiconductor chip, the method comprising:
resin-molding a semiconductor chip in a state in which a mold is pressed against a heat transfer surface that is provided on a surface of the semiconductor chip and a pressed surface that is set on the surface of the semiconductor chip at a position separate from the heat transfer surface.
2. The method of manufacturing a thermal type flowmeter according to claim 1 ,
wherein the pressed surface is set at a position between an edge that is located at the furthest position from the heat transfer surface of the semiconductor chip and the heat transfer surface.
3. The method of manufacturing a thermal type flowmeter according to claim 1 ,
wherein the heat transfer surface continues to the pressed surface.
4. The method of manufacturing a thermal type flowmeter according to claim 1 ,
wherein a substrate to which the semiconductor chip is mounted is provided; and
wherein the semiconductor chip is configured such that a back surface of the semiconductor chip is fixed to the substrate with an adhesive interposed between the semiconductor chip and the substrate.
5. The method of manufacturing a thermal type flowmeter according to claim 1 ,
wherein a processing unit that is mounted to the substrate along with the semiconductor chip is provided, and
wherein the semiconductor chip is provided with two separate sets of a plurality of terminals that are electrically connected to the processing unit via wires, and the pressed surface is set at a position between the two sets of terminals.
6. The method of manufacturing a thermal type flowmeter according to claim 5 ,
wherein an inspection terminal of the semiconductor chip is provided on the pressed surface.
7. The method of manufacturing a thermal type flowmeter according to claim 1 ,
wherein the semiconductor chip includes a flow volume detection unit, and
wherein the heat transfer surface is formed of a diaphragm of the flow volume detection unit.
8. The method of manufacturing a thermal type flowmeter according to claim 1 ,
wherein the semiconductor chip includes a moisture detection unit, and
wherein the pressed surface is formed of a diaphragm of the moisture detection unit.
9. The method of manufacturing a thermal type flowmeter according to claim 1 ,
wherein the semiconductor chip includes a flow volume detection unit and a processing unit.