IP Library Granted Patent US 9,680,097
Granted Patent B2
US 9,680,097 · App. 14/782,600 · Granted Jun 13, 2017

Organic thin film transistors and methods for their manufacturing and use

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Quick Facts
Patent No.
US 9,680,097
App. No.
14/782,600
Granted
Jun 13, 2017
Kind
B2
Abstract

Methods of forming an organic thin film transistor are provided. The methods include providing a substrate and depositing and patterning a gate electrode on a first surface of the substrate. The methods include dispensing a first droplet of an insulating material on the gate electrode on the substrate and dispensing a second droplet of a semiconductor material on a first surface of the first droplet. The second droplet forms a hydrophobic structure having a central cavity. The methods also include dispensing a third droplet of a conductor material on a first surface of the second droplet such that the conductor material substantially fills the central cavity of the hydrophobic structure and forms a conductor material layer around the central cavity to define a source electrode and a drain electrode of the organic thin film transistor.

Claims (38)

1. A method of forming an organic thin film transistor, the method comprising:

providing a substrate;

depositing and patterning a gate electrode on a first surface of the substrate;

dispensing a first droplet of an insulating material on the first surface of the substrate;

dispensing a second droplet of a semiconductor material on a first surface of the first droplet, wherein the second droplet forms a hydrophobic structure having a central cavity; and

dispensing a third droplet of a conductor material on a first surface of the second droplet, wherein the conductor material substantially fills the central cavity of the hydrophobic structure and forms a conductor material layer around the central cavity to define a source electrode and a drain electrode of the organic thin film transistor.

2. The method of claim 1 , wherein the substrate comprises a rigid substrate, or a flexible substrate.

3. The method of claim 2 , wherein the substrate comprises glass, silicon, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), or combinations thereof.

4. The method of claim 1 , wherein the gate electrode comprises indium tin oxide (ITO), doped silicon, indium zinc oxide, gold (Au), silver (Ag), molybdenum (Mo), titanium (Ti), aluminum (Al), poly (3,4-ethylenedioxythiophene): poly (styrenesulfonate) (PEDOT:PSS), polyaniline, or combinations thereof.

5. The method of claim 1 , wherein the insulating material comprises poly(4-vinylphenol) (PVPh), polyvinyl alcohol (PVA), poly (methyl methacrylate) (PMMA), polyvinylidene difluoride (PVDF), poly[(vinylidenefluoride-co-trifluoroethylene] [P(VDF-TrFE)], P(VDF-TFE), polyvinyl chloride (PVC), MDX6 nylon, polystyrene (PS), polyvinyl pyrrolidone (PVP), cyanoethylpullam (CYPEL), poly(α-methylstyrene) (PαMS), poly(ethyl methacrylate) (PEMA), poly(butyl methacrylate) (PBMA), polyethylene (PE),poly-(acrylonitrile) (PAN), polyaniline (PANI), or combinations thereof.

6. The method of claim 1 , further comprising heating the first droplet of the insulating material prior to dispensing the second droplet of the semiconductor material.

7. The method of claim 6 , wherein the first droplet of the insulating material is heated at a temperature of about 100° C. to about 250° C.

8. The method of claim 1 , wherein the semiconductor material comprises 6,13-Bis (triisopropylsilylethynyl) pentacene (TIPS pentacene), 6,13-bis(trimethylsilyl) pentacene, 6,13-Bis((triethylsilyl)ethynyl) pentacene, 6,13-bis (t-butyl ethynyl) pentacene, 6,13-bis (Hexyl ethynyl) pentacene, 6,13-triethylsilylethynyl anthradithiophene, poly (3-octylthiophene-2,5-diyl) (P3OT), or combinations thereof.

9. The method of claim 1 , wherein the semiconductor material comprises N,N-bis(n-octyl)-1,6-dicyanoperylene-3,4:9,10-bis(dicarboximide) (PDI-8CN2), poly{[N,N′-bis(2-octyldodecyl)-naphthalene 1,4,5,8 bis(dicarboximide)-2,6-diyl] alt-5,5′-(2,2′-bithiophene)}[P(NDI2OD-T2)], or combinations thereof.

10. The method of claim 1 , wherein the second droplet forms a well-shaped hydrophobic structure.

11. The method of claim 1 , wherein a diameter of the second droplet is relatively less than a diameter of the first droplet.

12. The method of claim 11 , wherein the diameter of the second droplet is about 0.3 times to about 0.6 times the diameter of the first droplet.

13. The method of claim 12 , wherein the diameter of the second droplet is about0.5 times the diameter of the first droplet.

14. The method of claim 1 , further comprising:

dissolving the second droplet in a solvent; and

drying the second droplet to form the hydrophobic structure.

15. The method of claim 14 , further comprising adding a hydrophobic agent to the second droplet.

16. The method of claim 15 , wherein the hydrophobic agent comprises oxygen (O 2 ), plasma, carbon tetrafluoride (CF 4 ) plasma, cationic di-n-decyl dimethyl ammonium chloride, benzalkonium chloride, or combinations thereof.

17. The method of claim 14 , wherein the solvent comprises chlorobenzene, 1,2 dichlorobenzene, or combinations thereof.

18. The method of claim 1 , wherein the conductor material comprises (poly (3,4-ethylenedioxythiophene): poly (styrenesulfonate)) (PEDOT:PSS), water soluble doped polyaniline, nano silver dissolved in water, nano gold dissolved in water, or combinations thereof.

19. A method of forming a three-dimensional feature on a substrate, the method comprising:

sequentially dispensing at least three droplets of at least three different deposition materials on a first surface of the substrate to form the three-dimensional feature on the substrate, wherein the at least three droplets are dispensed on substantially same location of the substrate to form overlapping droplets on the substrate; and

adjusting hydrophobic properties of respective surfaces of the overlapping droplets to facilitate self-assembling of the overlapping droplets on the substrate and to control a profile of the three-dimensional feature.

20. The method of claim 19 , further comprising controlling a drop volume of each of the at least three droplets to control the profile of the three-dimensional feature.

21. The method of claim 19 , wherein sequentially dispensing the at least three droplets comprises sequentially dispensing droplets of a dielectric material, a semiconductor material and a conductor material on the substrate to form an organic thin film transistor.

22. The method of claim 21 , wherein a diameter of the droplet of the semiconductor material is relatively less than a diameter of the droplet of the dielectric material to form a hydrophobic feature with a central cavity on a first surface of the droplet of the dielectric material.

23. The method of claim 22 , wherein hydrophobic properties of the droplet of the semiconductor material are adjusted such that the conductor material fills the central cavity and forms a conductor material layer around the central cavity to define a source electrode and a drain electrode of the organic thin film transistor.

24. An organic thin film transistor, comprising:

a substrate, with a patterned gate electrode, formed on a first surface of the substrate;

an insulating layer disposed on the first surface of the substrate;

a semiconductor layer, having a well-shaped structure with a central cavity, disposed on a first surface of the insulating layer, wherein a first surface of the well-shaped structure is a hydrophobic surface; and

a water-soluble conductor material, disposed around the semiconductor layer and within the central cavity of the semiconductor layer, to form a source electrode and a drain electrode of the organic thin film transistor.

25. The organic thin film transistor of claim 24 , wherein the hydrophobic surface of the semiconductor layer facilitates self-alignment of the water-soluble conductor material to form the source electrode and the drain electrode on the substrate.

Assignments (4)
RELEASE OF SECURITY INTEREST IN PATENTS, RECORDED ON JANUARY 29, 2019 AT REEL 048373 FRAME 0217 Recorded Sep 22, 2025
From: CRESTLINE DIRECT FINANCE, L.P., AS COLLATERAL AGENT
To: EMPIRE TECHNOLOGY DEVELOPMENT LLC
Reel/Frame 072936/0464 →
RELEASE OF SECURITY INTEREST Recorded Jul 31, 2019
From: CRESTLINE DIRECT FINANCE, L.P.
To: EMPIRE TECHNOLOGY DEVELOPMENT LLC
Reel/Frame 049924/0794 →
SECURITY INTEREST Recorded Jan 29, 2019
From: EMPIRE TECHNOLOGY DEVELOPMENT LLC
To: CRESTLINE DIRECT FINANCE, L.P.
Reel/Frame 048373/0217 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 7, 2015
From: MANDAL, SAUMEN; KATIYAR, MONICA
To: INDIAN INSTITUTE OF TECHNOLOGY KANPUR
Reel/Frame 036753/0061 →