Optoelectronic component and method of producing an optoelectronic component
View Patent ↗An optoelectronic device includes a carrier on which a semiconductor layer sequence is applied, said semiconductor layer sequence including an n-doped semiconductor layer and a p-doped semiconductor layer such that a p-n junction is formed which includes an active zone that generates electromagnetic radiation, wherein at least one of the n-doped semiconductor layer and the p-doped semiconductor layer includes a doped region having a first doping concentration greater than a second doping concentration in a surrounding area of the region in the semiconductor layer including the region.
1. An optoelectronic device comprising:
a earner on which a semiconductor layer sequence is applied, the semiconductor layer sequence comprising an n-doped semiconductor layer and a p-doped semiconductor layer such that a p-n junction is formed which comprises an active zone that generates electromagnetic radiation, wherein
at least one of the n-doped semiconductor layer and the p-doped semiconductor layer comprises a doped region having a first doping concentration greater than a second doping concentration in a surrounding area of the region in the semiconductor layer comprising the region,
either the region is formed to extend to and contact the p-n junction, or the region is formed to extend through the p-n junction and connect the two doped semiconductor layers.
2. The optoelectronic device according to claim 1 , having a multiplicity of the doped regions, wherein
the doped regions each have a lower breakdown voltage in a reverse direction for the p-n junction than the breakdown voltage in the reverse direction in the surrounding areas of the doped regions,
the doped regions are laterally spaced apart from each other, and
regions having the second doping concentration are provided between adjacent doped regions.
3. The optoelectronic device according to claim 1 , wherein the region is n-doped and the second doping concentration is the doping concentration of the n-doped semiconductor layer.
4. The optoelectronic device according to claim 1 , wherein the region is p-doped and the second doping concentration is the doping concentration of the p-doped semiconductor layer.
5. The optoelectronic device according to claim 1 , wherein the region is formed adjacent to a defect formed in the semiconductor layer comprising the region.
6. The optoelectronic device according to claim 5 , wherein the defect is a V pit.
7. The optoelectronic device according to claim 1 , wherein the region is formed adjacent to a via formed in the semiconductor layer comprising the region.
8. The optoelectronic device according to claim 1 , wherein the region is formed at an outer surface facing away from the semiconductor layer sequence of the semiconductor layer comprising the region.
9. The optoelectronic device according to claim 1 , wherein a plurality of regions are formed, and the semiconductor layer comprising the regions has a modulated doping.
10. The optoelectronic device according to claim 1 , wherein the region has an area of at least 25 μm 2 .
11. A method of producing an optoelectronic device comprising:
applying a semiconductor layer sequence on a carrier and comprises an n-doped and a p-doped semiconductor layer, and
forming a p-n junction comprising an active zone that generates electromagnetic radiation, wherein
a region of the at least one of the n-doped and p-doped semiconductor layers is provided with a dopant so that the region is doped with a first doping concentration greater than a second doping concentration in a surrounding area of the region in the semiconductor layer comprising the region, and
prior to provision of the region with the dopant, at least one exposed surface of the semiconductor layer sequence is provided with a protective layer against doping with the dopant.
12. The method according to claim 11 , wherein a defect is formed in at least one of the doped semiconductor layers, which defect is provided with the dopant, and the doped region is formed adjacent to the defect.
13. The method according to claim 11 , wherein a via is formed in at least one of the doped semiconductor layers, into which via the dopant is introduced, and the doped region is formed adjacent to the via.
14. The optoelectronic device according to claim 1 , wherein the region is formed adjacent to a defect formed in the semiconductor layer comprising the region, wherein the defect is an epi tube.
15. The optoelectronic device according to claim 14 , wherein the epi tube has a diameter of smaller than 1 μm and extends vertically through layers of the semiconductor layer sequence.
16. An optoelectronic device comprising:
a carrier on which a semiconductor layer sequence is applied, the semiconductor layer sequence comprising an n-doped semiconductor layer and a p-doped semiconductor layer such that a p-n junction is formed which comprises an active zone that generates electromagnetic radiation, wherein
at least one of the n-doped semiconductor layer and the p-doped semiconductor layer comprises a doped region having a first doping concentration greater than a second doping concentration in a surrounding area of the region in the semiconductor layer comprising the region,
the region is formed adjacent to a defect formed in the semiconductor layer comprising the region, wherein the defect is an epi tube, and
the epi tube has a diameter smaller than 1 μm and extends vertically through layers of the semiconductor layer sequence.