Method for producing a plurality of radiation-emitting semiconductor chips
View Patent ↗A method is provided for producing a plurality of radiation-emitting semiconductor chips, having the following steps: providing a plurality of semiconductor bodies ( 1 ) which are suitable for emitting electromagnetic radiation from a radiation exit face ( 3 ), applying the semiconductor bodies ( 1 ) to a carrier ( 2 ), applying a first mask layer ( 4 ) to regions of the carrier ( 2 ) between the semiconductor bodies ( 1 ), applying a conversion layer ( 5 ) to the entire surface of the semiconductor bodies ( 1 ) and the first mask layer ( 4 ) using a spray coating method, and removing the first mask layer ( 4 ), such that in each case a conversion layer ( 5 ) arises on the radiation exit faces ( 3 ) of the semiconductor bodies ( 1 ).
1. A method for producing a plurality of radiation-emitting semiconductor chips having the following steps:
providing a plurality of semiconductor bodies which are suitable for emitting electromagnetic radiation from a radiation exit face;
applying the semiconductor bodies to a carrier;
applying a first mask layer to regions of the carrier between the semiconductor bodies;
applying a conversion layer to the entire surface of the semiconductor bodies and the first mask layer using a spray coating method;
removing the first mask layer, such that in each case a conversion layer arises on the radiation exit faces of the semiconductor bodies;
applying a second mask layer to the conversion layer, which in each case completely covers the conversion layer and leaves the regions between the semiconductor bodies free;
applying a reflective layer over the entire surface of the second mask layer and the regions between the semiconductor bodies using a spray coating method; and
removing the second mask layer, such that the regions between the semiconductor bodies are covered with a reflective layer.
2. The method according to claim 1 , in which the first mask layer projects above the semiconductor bodies.
3. The method according to claim 1 , in which the conversion layer comprises an organic potting material, into which particles of an inorganic luminescent material have been introduced.
4. The method according to claim 3 , in which the spray coating method for applying the conversion layer ( 5 ) comprises the following steps:
providing a suspension of the luminescent material particles, the organic potting material and an organic solvent; and
spraying the suspension onto the surface to be coated.
5. The method according to claim 4 , in which the luminescent material particles have a concentration of between 10% by weight and 45% by weight inclusive in the suspension.
6. The method according to claim 1 , in which the diameter of the luminescent material particles has a median d 50 of at most 35 micrometers.
7. The method according to claim 1 , in which the conversion layer has a thickness of between 5 micrometers and 80 micrometers inclusive.
8. The method according to one claim 1 , in which the spray coating method for applying the conversion layer comprises a plurality of successive spraying steps, wherein in each spraying step an individual conversion layer is produced.
9. The method according to claim 8 , in which the individual conversion layers are dried between the individual spraying steps.
10. The method according to claim 1 , in which the reflective layer comprises reflective particles, which have been introduced into an organic potting material.
11. The method according to claim 1 , in which the spray coating method for applying the reflective layer comprises the following steps:
providing a suspension of reflective particles, an organic potting material and an organic solvent; and
spraying the suspension onto the surface to be coated.
12. The method according to claim 1 , in which the reflective layer has a thickness of between 5 micrometers and 30 micrometers inclusive.
13. The method according to claim 1 , in which one of the following devices is used as first mask layer and/or second mask layer: a patterned photoresist layer, a stencil or a prepatterned film.
14. A method for producing a plurality of radiation-emitting semiconductor chips having the following steps:
providing a plurality of semiconductor bodies which are suitable for emitting electromagnetic radiation from a radiation exit face;
applying the semiconductor bodies to a carrier;
applying a first mask layer to regions of the carrier between the semiconductor bodies;
applying a conversion layer to the entire surface of the semiconductor bodies and the first mask layer using a spray coating method;
removing the first mask layer, such that in each case a conversion layer arises on the radiation exit faces of the semiconductor bodies; and
applying an adhesion promoting layer over the entire surface of the carrier with the semiconductor bodies, wherein in each case a conversion layer is arranged on the radiation exit face.
15. A method for producing a plurality of radiation-emitting semiconductor chips having the following steps:
providing a plurality of semiconductor bodies which are suitable for emitting electromagnetic radiation from a radiation exit face;
applying the semiconductor bodies to a carrier;
applying a first mask layer to regions of the carrier between the semiconductor bodies;
applying a conversion layer to the entire surface of the semiconductor bodies and the first mask layer using a spray coating method;
removing the first mask layer, such that in each case a conversion layer arises on the radiation exit faces of the semiconductor bodies; and
applying a reflective layer over the entire surface of the semiconductor bodies, such that a reflective layer is arranged in the beam path of the semiconductor bodies of the subsequent semiconductor chips.