IP Library Granted Patent US 9,331,151
Granted Patent B2
US 9,331,151 · App. 14/788,159 · Granted May 3, 2016

Method for coupling a graphene layer and a substrate and device comprising the graphene/substrate structure obtained

Inventors: Sebastiano Ravesi (Catania, IT); Corrado Accardi (Ragusa, IT); Cristina Tringali (Augusta, IT); Noemi Graziana Sparta′ (Catania, IT); Stella Loverso (Catania, IT); Filippo Giannazzo (Catania, IT)
Assignee: STMicroelectronics S.r.l.
H01L29/1606H01L21/02376H01L21/7624H01L29/78603H01L29/78684H01L31/028
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Quick Facts
Patent No.
US 9,331,151
App. No.
14/788,159
Granted
May 3, 2016
Kind
B2
Abstract

The present disclosure regards a method for coupling a graphene layer to a substrate having at least one hydrophilic surface, the method comprising the steps of providing the substrate having at least one hydrophilic surface, depositing on the hydrophilic surface a layer of a solvent selected in the group constituted by acetone, ethyl lactate, isopropyl alcohol, methylethyl ketone and mixtures thereof and depositing on the solvent layer a graphene layer. It moreover regards an electronic device comprising the graphene/substrate structure obtained.

Claims (50)

1. An electronic device comprising:

a substrate having at least one hydrophilic surface that includes hydroxyl and silanolic groups,

a graphene layer, and

elements or functional groups from a solvent selected from the group consisting of acetone, ethyl lactate, isopropyl alcohol, methylethyl ketone, and mixtures thereof, located between said substrate and said graphene layer and integrated with the hydrophilic surface to obtain a contact angle of the hydrophilic surface of about 40 degrees.

2. The device according to claim 1 , wherein the device is one of a transistor, a non-volatile memory, a photodetector, an NH 3 and NO 2 sensor.

3. The device according to claim 1 , wherein the substrate includes silicon oxide.

4. The device according to claim 1 , wherein the substrate is made of silicon oxide or passivized silicon.

5. The device according to claim 1 , wherein the elements or functional groups include alkyl groups.

6. The device according to claim 5 , wherein the device is one of a transistor, a non-volatile memory, a photodetector, an NH 3 and NO 2 sensor.

7. The device according to claim 5 , wherein the substrate includes silicon oxide.

8. The device according to claim 1 , wherein the elements or functional groups include ketone compounds.

9. The device according to claim 8 , wherein the device is one of a transistor, a non-volatile memory, a photodetector, an NH 3 and NO 2 sensor.

10. The device according to claim 8 , wherein the substrate includes silicon oxide.

11. The device according to claim 1 , wherein the elements or functional groups include carbonyl groups.

12. The device according to claim 11 , wherein the device is one of a transistor, a non-volatile memory, a photodetector, an NH 3 and NO 2 sensor.

13. The device according to claim 11 , wherein the substrate includes silicon oxide.

14. The device according to claim 1 , wherein the elements or functional groups are from a mixture of methylethyl ketone and ethyl lactate.

15. The device according to claim 14 , wherein the device is one of a transistor, a non-volatile memory, a photodetector, an NH 3 and NO 2 sensor.

16. The device according to claim 14 , wherein the substrate includes silicon oxide.

17. The device according to claim 1 , wherein a sheet resistance of the graphene layer is about 0.9 kilo-ohms per square.

18. An electronic device comprising:

a substrate having at least one hydrophilic surface,

a graphene layer, and

elements or functional groups from a solvent selected from the group consisting of acetone, ethyl lactate, isopropyl alcohol, methylethyl ketone, and mixtures thereof, located between said substrate and said graphene layer and integrated with the hydrophilic surface to obtain a contact angle of the hydrophilic surface of about 40 degrees, the elements or functional groups including alkyl groups.

19. The device according to claim 18 , wherein the device is one of a transistor, a non-volatile memory, a photodetector, an NH 3 and NO 2 sensor.

20. The device according to claim 18 , wherein the substrate includes silicon oxide.

21. An electronic device comprising:

a substrate having at least one hydrophilic surface,

a graphene layer, and

elements or functional groups from a solvent selected from the group consisting of acetone, ethyl lactate, isopropyl alcohol, methylethyl ketone, and mixtures thereof, located between said substrate and said graphene layer and integrated with the hydrophilic surface to obtain a contact angle of the hydrophilic surface of about 40 degrees, the elements or functional groups include ketone compounds.

22. The device according to claim 21 , wherein the device is one of a transistor, a non-volatile memory, a photodetector, an NH3 and NO2 sensor.

23. The device according to claim 21 , wherein the substrate includes silicon oxide.

24. An electronic device comprising:

a substrate having at least one hydrophilic surface,

a graphene layer, and

elements or functional groups from a solvent selected from the group consisting of acetone, ethyl lactate, isopropyl alcohol, methylethyl ketone, and mixtures thereof, located between said substrate and said graphene layer and integrated with the hydrophilic surface to obtain a contact angle of the hydrophilic surface of about 40 degrees, the elements or functional groups include carbonyl groups.

25. The device according to claim 24 , wherein the device is one of a transistor, a non-volatile memory, a photodetector, an NH3 and NO2 sensor.

26. The device according to claim 24 , wherein the substrate includes silicon oxide.

27. An electronic device comprising:

a substrate having at least one hydrophilic surface,

a graphene layer, and

elements or functional groups from a mixture of methylethyl ketone and ethyl lactate, located between said substrate and said graphene layer and integrated with the hydrophilic surface to obtain a contact angle of the hydrophilic surface of about 40 degrees.

28. The device according to claim 27 , wherein the device is one of a transistor, a non-volatile memory, a photodetector, an NH3 and NO2 sensor.

29. The device according to claim 27 , wherein the substrate includes silicon oxide.

30. An electronic device comprising:

a substrate having at least one hydrophilic surface,

a graphene layer having a sheet resistance of about 0.9 kilo-ohms per square, and

elements or functional groups from a solvent selected from the group consisting of acetone, ethyl lactate, isopropyl alcohol, methylethyl ketone, and mixtures thereof, located between said substrate and said graphene layer and integrated with the hydrophilic surface to obtain a contact angle of the hydrophilic surface of about 40 degrees.

31. The device according to claim 30 , wherein the device is one of a transistor, a non-volatile memory, a photodetector, an NH3 and NO2 sensor.

32. The device according to claim 30 , wherein the substrate includes silicon oxide.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 7, 2022
From: STMICROELECTRONICS S.R.L.
To: STMICROELECTRONICS INTERNATIONAL N.V.
Reel/Frame 060301/0355 →
Priority Claims (1)
IT TO2013A0348 · Apr 30, 2013 · national
Continuity (2)
Continuation 14265034 · Apr 29, 2014
Related Publication 20150303264A1 · Oct 22, 2015