Imaging apparatus, microscope system, and imaging method

1. An imaging apparatus comprising:

a stage on which an object is configured to be placed;

a sensor having an imaging surface configured to receive observation light from the object, the sensor configured to tilt about a focal plane relatively with respect to an axis parallel to a direction of movement of a first actuator, the first actuator configured to perform a relative movement between the stage and the sensor along at least one direction within a placement plane for placing the object, wherein a second actuator is configured to perform a relative movement between the stage and the sensor along a direction orthogonal to the placement plane;

and

a processor configured to cause the sensor to image a first region of the object while causing the first actuator to operate, acquire information on the first region based on a result of imaging, and calculate a focus tendency of the object, and configured to control the second actuator based on the focus tendency, and adjust an imaging characteristic of the observation light when causing the sensor to image a second region of the object that is different from the first region, the imaging characteristic of the observation light being a focus position of an image of the object formed on the imaging surface, wherein the information on the first region is a distribution of a focus position that is a position where a focus evaluation value indicating a contrast level in the direction orthogonal to the placement plane is the largest, and the distribution is in at least one direction on the placement plane, wherein the processor is configured to calculate a representative value of the distribution of the focus position, and change the imaging characteristic when imaging the second region, based on a relationship between the representative value and a range of the focal plane of the sensor in the direction orthogonal to the placement plane.

2. The imaging apparatus according to claim 1 , wherein the processor is configured to adjust the imaging characteristic of the observation light by adjusting a relative positional relationship between the object and a focal point of the sensor in an optical axis direction.

3. The imaging apparatus according to claim 1 , wherein the processor is configured to adjust a position of an image of the object formed on the imaging surface by changing a distance between the stage and the sensor.

4. The imaging apparatus according to claim 1 , wherein the processor is configured to acquire the distribution of the focus position based on a contrast of a luminance value in the direction orthogonal to the placement plane.

5. The imaging apparatus according to claim 1 , wherein the processor is configured to adjust the imaging characteristic of the observation light such that the imaging characteristic changes according to the information on the first region and an amount of movement by the first actuator between the imaging on the first region and the imaging on the second region.

6. An imaging apparatus comprising:

a stage on which an object is configured to be placed;

a sensor having an imaging surface configured to receive observation light from the object, the sensor configured to tilt about a focal plane relatively with respect to an axis parallel to a direction of movement of a first actuator, the first actuator configured to perform a relative movement between the stage and the sensor along at least one direction within a placement plane for placing the object, wherein a second actuator is configured to perform a relative movement between the stage and the sensor along a direction orthogonal to the placement plane; and

a processor configured to cause the sensor to image a first region of the object while causing the first actuator to operate, acquire information on the first region based on a result of imaging, and calculate a focus tendency of the object, and configured to control the second actuator based on the focus tendency, and adjust an imaging characteristic of the observation light when causing the sensor to image a second region of the object that is different from the first region, the imaging characteristic of the observation light being a focus position of an image of the object formed on the imaging surface,

wherein the processor is configured to: calculate a plane that is parallel to the placement plane and has a largest total area of regions where a focus evaluation value indicating a contrast level in the direction orthogonal to the placement plane is the largest; and change the imaging characteristic when imaging the second region, based on a relationship between the plane having the largest total area and a range of the focal plane of the sensor in the direction orthogonal to the placement plane.

7. The imaging apparatus according to claim 6 , wherein the processor is configured to include, in calculation of the total area, only an area of a region that is larger than a specified threshold, among the regions where the focus evaluation value is the largest.

8. An imaging apparatus comprising:

a stage on which an object is configured to be placed;

a sensor having an imaging surface configured to receive observation light from the object, the sensor configured to tilt about a focal plane relatively with respect to an axis parallel to a direction of movement of a first actuator, the first actuator configured to perform a relative movement between the stage and the sensor along at least one direction within aplacement plane for placing the object, wherein a second actuator is configured to perform a relative movement between the stage and the sensor along a direction orthogonal to the placement plane; and

a processor configured to cause the sensor to image a first region of the object while causing the first actuator to operate, acquire information on the first region based on a result of imaging, and calculate a focus tendency of the object, and configured to control the second actuator based on the focus tendency, and adjust an imaging characteristic of the observation light when causing the sensor to image a second region of the object that is different from the first region, the imaging characteristic of the observation light being a focus position of an image of the object formed on the imaging surface, wherein the information on the first region is a distribution of a focus position that is a position where a focus evaluation value indicating a contrast level in the direction orthogonal to the placement plane is the largest, and the distribution is in at least one direction on the placement plane, and wherein the processor is configured to: calculate a regression plane or a regression surface of the distribution of the focus position; estimate a distribution of a focus position at an arbitrary position different from the first region based on the regression plane or the regression surface; and adjust the imaging characteristic based on the estimated distribution of the focus position.

9. An imaging apparatus comprising:

a stage on which an object is configured to be placed;

a sensor having an imaging surface configured to receive observation light from the object, the sensor configured to tilt about a focal plane relatively with respect to an axis parallel to a direction of movement of a first actuator, the first actuator configured to perform a relative movement between the stage and the sensor along at least one direction within a placement plane for placing the object, wherein a second actuator is configured to perform a relative movement between the stage and the sensor along a direction orthogonal to the placement plane; and

a processor configured to cause the sensor to image a first region of the object while causing the first actuator to operate, acquire information on the first region based on a result of imaging, and calculate a focus tendency of the object, and configured to control the second actuator based on the focus tendency, and adjust an imaging characteristic of the observation light when causing the sensor to image a second region of the object that is different from the first region, the imaging characteristic of the observation light being a focus position of an image of the object formed on the imaging surface, wherein the information on the first region is a distribution of a focus position that is a position where a focus evaluation value indicating a contrast level in the direction orthogonal to the placement plane is the largest, and the distribution is in at least one direction on the placement plane, and wherein

the processor is configured to: cause the sensor to image a plurality of different regions of the object while causing the first actuator to operate; acquire information on each of the plurality of regions from results of imaging; estimate a distribution of a focus position at an arbitrary position other than the plurality of regions based on the information on each of the plurality of regions; and adjust the imaging characteristic based on the estimated distribution of the focus position, and

the information on each of the plurality of regions is one of:

a distribution of a focus position in each of the plurality of regions;

a representative value or a statistical value of the distribution of the focus position;

information on a plane that is parallel to the placement plane and has a largest total area of regions where the focus evaluation value indicating the contrast level in the direction orthogonal to the placement plane is the largest; and

information on a regression plane or a regression surface of the distribution of the focus position.

10. A microscope system comprising:

an imaging apparatus comprising:

a stage on which an object is configured to be placed;

a sensor having an imaging surface configured to receive observation light from the object, the sensor configured to tilt about a focal plane relatively with respect to an axis parallel to a direction of movement of a first actuator, the first actuator configured to perform a relative movement between the stage and the sensor along at least one direction within a placement plane for placing the object, wherein a second actuator is configured to perform a relative movement between the stage and the sensor along a direction orthogonal to the placement plane; and

a processor configured to cause the sensor to image a first region of the object while causing the first actuator to operate, acquire information on the first region based on a result of imaging, and calculate a focus tendency of the object, and configured to control the second actuator based on the focus tendency, and adjust an imaging characteristic of the observation light when causing the sensor to image a second region of the object that is different from the first region, the imaging characteristic of the observation light being a focus position of an image of the object formed on the imaging surface, wherein the information on the first region is a distribution of a focus position that is a position where a focus evaluation value indicating a contrast level in the direction orthogonal to the placement plane is the largest, and the distribution is in at least one direction on the placement plane, wherein the processor is configured to calculate a representative value of the distribution of the focus position, and change the imaging characteristic when imaging the second region, based on a relationship between the representative value and a range of the focal plane of the sensor in the direction orthogonal to the placement plane;

and

an illumination unit configured to illuminate the object.

11. An imaging method executed by an imaging apparatus, the imaging apparatus comprising: a stage on which an object is configured to be placed; an sensor having an imaging surface configured to receive observation light from the object, the sensor configured to tilt about a focal plane relatively with respect to an axis parallel to a direction of movement of a first actuator; the first actuator configured to perform a relative movement between the stage and the sensor along at least one direction within a placement plane for placing the object; and a second actuator configured to perform a relative movement between the stage and the sensor-along a direction orthogonal to the placement plane,

the method comprising:

causing the sensor to image a first region of the object while causing the first actuator to operate;

acquiring information on the first region based on a result of imaging;

calculating a focus tendency of the object;

controlling the second actuator based on the focus tendency; and

adjusting an imaging characteristic of the observation light when causing the sensor to image a second region of the object that is different from the first region, the imaging characteristic of the observation light being a focus position of an image of the object formed on the imaging surface, wherein the information on the first region is a distribution of a focus position that is a position where a focus evaluation value indicating a contrast level in the direction orthogonal to the placement plane is the largest, and the distribution is in at least one direction on the placement plane, wherein the processor is configured to calculate a representative value of the distribution of the focus position, and change the imaging characteristic when imaging the second region, based on a relationship between the representative value and a range of the focal plane of the sensor in the direction orthogonal to the placement plane.