Self-aligned dual trench device
View Patent ↗A power MOSFET or a power rectifier may be fabricated according to the invention to include a gate trench and a field plate trench. Both trenches can be formed with a two-step etching process as described in detail in the specification. The devices that embody this invention can be fabricated with higher packaging density and better and more tightly distributed device parameters such as the V F , R DSS , and BV.
1. A process of forming two adjacent trenches in a chip having top and bottom semiconductor surfaces, comprising:
etching to remove semiconductor material to form a first trench and an adjacent wider second trench having a bottom and shoulders;
depositing a first material to fill the first trench to its full depth and to cover the bottom and the shoulders of the second trench;
removing the first material from the second trench but only partially from the first trench; and
etching to remove semiconductor material to extend the second trench deeper towards the bottom semiconductor surface, creating a final second trench and forming a raised edge on side walls of the final second trench.
2. The process of claim 1 , in which the location of the raised edge measured from a bottom of the final second trench is equal to the depth of the first trench.
3. The process of claim 1 , in which the first trench and the final second trench are portions of a MOSFET or a rectifier.
4. A process comprising;
providing a photomask having a repetitive pattern to be used for creating first trenches and wider second trenches;
forming on a surface of a wafer an image with the provided photomask;
etching to remove semiconductor material to form in the wafer a first trench and a top part of a wider second trench;
depositing a first film covering a bottom and a shoulder of the second trench's top part but completely filling the first trench to its full depth; and
conducting a second etching to remove semiconductor material and creating a second trench extending deeper than its top part and forming a raised ledge a first distance from a bottom of the second trench and a second distance from the wafer surface.
5. The process of claim 4 , further comprising a removing step with which the first film is completely removed from the second trench but only recessed a certain depth in the first trench.
6. The process of claim 5 , further comprising after the removing step forming a hard mask in the recess over the first film.
7. The process of claim 4 , in which the first trench is shielded from the second etching by a hard mask.
8. The process of claim 6 , in which the hard mask is formed with an isotropic oxide etching step.
9. The process of claim 4 , in which the second etching step is anisotropic.
10. The process of 6 , in which the hard mask exposes a portion of the shoulder of the second trench.
11. The process of claim 4 , in which the first distance is equal to the depth of the first trench.
12. The process of claim 4 , in which the second distance is equal to the depth of the first trench.