Encapsulated beam and method of forming
View Patent ↗A device including a protecting material encapsulated metallic beam and a method of encapsulating the metallic beam using the protecting material layer are presented. The device includes a cantilever beam that includes at least about 90 Wt % of a metallic beam material, and 10 Wt % or less of a protecting material. The method of forming an encapsulated metallic beam includes the steps of depositing a first layer of protecting material over a substrate, depositing a second layer of protecting material over the first layer, depositing a metallic beam material over the second layer of protecting material, and encapsulating the beam material with a coating of the protecting material.
1. A device, comprising:
a metallic beam material comprising a free portion and an anchor region, wherein the free portion is encapsulated by a single layer of protecting material, wherein the single layer of protecting material comprises a lip at the free portion of the metallic beam material, and wherein the protecting material comprises elemental metals, alloys, or combination of elemental metals and alloys.
2. The device of claim 1 , wherein the metallic beam material is in a monolithic form.
3. The device of claim 1 , wherein the anchor region of the metallic beam material is encapsulated by the protecting material.
4. The device of claim 1 , wherein the protecting material has a higher electrical conductivity than the metallic beam material.
5. The device of claim 1 , wherein the metallic beam material comprises nickel, tin, platinum, silver, copper, gold, nickel tungsten alloy, nickel iron alloy, or any combinations of the foregoing.
6. The device of claim 1 , wherein the protecting material comprises gold, nickel, tin, platinum, silver, copper, or any combinations of the foregoing.
7. The device of claim 1 , wherein the metallic beam material is a nickel tungsten alloy and the protecting material is gold.
8. The device of claim 1 , wherein the metallic beam material forms a core region of a coated cantilever beam.
9. The device of claim 8 , wherein the protecting material forms a coating of the coated cantilever beam.
10. The device of claim 9 , wherein the coating has a thickness less than about a micron.
11. The device of claim 9 , wherein the coated cantilever beam comprises at least about 90 Wt% of the metallic beam material, and 10 Wt% or less of the protecting material.
12. A device, comprising:
a coated cantilever beam comprising:
a monolithic core region of a metallic beam material comprising nickel tungsten alloy, wherein the monolithic core region comprises a free portion and an anchor region; and
a single layer coating of a protecting material comprising gold, wherein the free portion of the monolithic core region is encapsulated by the coating, and wherein the single layer coating of the protecting material comprises a lip at the free portion of the monolithic core region.
13. The device of claim 12 , wherein the anchor region is encapsulated by the protecting material.
14. The device of claim 12 , wherein the protecting material has a higher electrical conductivity than the metallic beam material.
15. The device of claim 12 , wherein the metallic beam material is a nickel tungsten alloy and the protecting material is gold.