Display device and method of manufacturing the same
View Patent ↗The display device includes a substrate, a thin film transistor (TFT), which includes a gate electrode, a semiconductor layer, and source and drain electrodes, on the substrate member, a passivation layer on the TFT and having an opening to expose a portion of the drain electrode, and a pixel electrode directly on the drain electrode and only within the opening.
1. A method for manufacturing a display device, comprising:
forming gate wirings comprising a gate line and a gate electrode on a substrate;
forming a gate insulating layer covering the gate wirings;
forming a semiconductor layer on the gate insulating layer, at least a portion of the semiconductor layer overlapping the gate electrode;
forming data wirings comprising a source electrode and a drain electrode, each of which comprises at least one portion overlapping with the gate electrode and is separated from each other, and a data line on the semiconductor layer;
forming a passivation layer on the data wirings;
forming a photosensitive polymer pattern on the passivation layer through a photolithography process using a mask;
etching the passivation layer using the photosensitive polymer pattern to form an opening exposing a portion of the drain electrode;
forming a conductive layer on the portion of the drain electrode exposed via the opening and on the photosensitive polymer pattern; and
removing the photosensitive polymer pattern and the conductive layer on the photosensitive polymer pattern to form a pixel electrode,
wherein an area of the entire drain electrode is greater than an area of the entire pixel electrode.
2. The method of claim 1 , wherein the pixel electrode is formed only within the opening of the passivation layer so as to entirely overlap a pixel part of the drain electrode.
3. The method of claim 1 , wherein the forming of the gate wirings comprises forming a storage electrode line.
4. The method of claim 3 , wherein the storage electrode line and the semiconductor layer are formed such that at least portions of the storage electrode line and the semiconductor layer overlap.
5. The method of claim 1 , further comprising:
forming an ohmic contact layer between the semiconductor layer and the data wirings.
6. A method for manufacturing a display device, comprising:
forming gate wirings comprising a gate line and a gate electrode on a substrate;
forming a gate insulating layer covering the gate wirings;
forming a semiconductor layer on the gate insulating layer, at least a portion of the semiconductor layer overlapping the gate electrode;
forming data wirings comprising a source electrode and a drain electrode, each of which comprises at least one portion overlapping with the gate electrode and is separated from each other, and a data line on the semiconductor layer;
forming a passivation layer on the data wirings;
forming a photosensitive polymer pattern on the passivation layer through a photolithography process using a mask;
etching the passivation layer using the photosensitive polymer pattern to form an opening exposing a portion of the drain electrode;
forming a conductive layer on the portion of the drain electrode exposed via the opening and on the photosensitive polymer pattern; and
removing the photosensitive polymer pattern and the conductive layer on the photosensitive polymer pattern to form a pixel electrode,
wherein the pixel electrode comprises at least one of aluminum (Al), silver (Ag), and gold (Au).