Dosimetry apparatus, systems, and methods
A direct ion storage (DIS) radiation detector or dosimeter has a design that is easy and low cost to manufacture using semiconductor processing techniques. The detectors include internal communications interfaces so they are easy to read. Different interfaces, including wired, e.g. USB ports, and wireless interfaces, may be used, so that the dosimeters may be read over the internet. The detectors can thus be deployed or used in a variety of detection systems and screening methods, including periodic or single time screening of people, objects, or containers at a location by means of affixed dosimeters; screening of objects, containers or people at a series of locations by means of affixed dosimeters, and surveillance of an area by monitoring moving dosimeters affixed to people or vehicles.
1. A method of making a direct ion storage (DIS) radiation dosimeter comprising:
forming a first layer having a MOSFET structure thereon by semiconductor processing techniques;
forming a second layer having a first concavity therein;
forming a third layer, having a second concavity therein;
sandwiching the first layer between the second and third layer;
bonding the three layers together to form hermetic seal;
wherein the first concavity, in the second layer, communicates with the second concavity, in the third layer, through the first layer to form an ion chamber containing said MOSFET structure.
2. The method of claim 1 , comprising forming more than one MOSFET structure in said first layer, forming a corresponding number of first concavities in said second layer, and forming a corresponding number of second concavities in said third layer, to form an ion chamber over each MOSFET structure.
3. The method of claim 2 , comprising forming said first concavities in said second layer and said second concavities in said third layer such that each said ion chamber over each MOSFET structure have each a different size.
4. The method of claim 2 , comprising filling each ion chamber over each MOSFET structure with a different gas.
5. The method of claim 2 , comprising filling each ion chamber over each MOSFET structure with a gas at a different pressure.