Universal hermetically sealed button pressure sensor
A hermetically-sealed universal pressure sensor comprises a MEMS disk, a compensate disk, and an optional interconnect ring. The MEMS disk has one or more MEMS dies that can convert ambient pressures to electrical signals, which is processed and compensated at an integrated circuit on the compensate disk. The interconnect ring can optionally provide electrical connections and hermetic seal properties between the MEMS disk and the compensate disk.
1. A pressure sensing system, comprising:
a MEMS disk, comprising a base structure having one or more port openings, and one or more MEMS dies, attached to the base structure, wherein each of the MEMS dies consists of a flat and solid top side and a bottom side having an open cavity, and each of the MEMS dies is attached and hermatically sealed to the MEMS disk at the bottom cavity side, wherein the MEMS dies are configured to:
receiving one or more input electrical voltages at the top side,
remain free from fluid pressure or mechanical compression at the top side,
sensing one or more pressures from a fluid exerted into the open cavity at the bottom side of the MEMs die, wherein the fluid is contained within the cavity, and
converting the pressures to one or more output electrical voltages; and
a compensate disk comprising one or more integrated circuits, which are electrically connected to said MEMS dies and capable of receiving electrical signals from said MEMS dies.
2. The system of claim 1 , further comprising an interconnect structure having one or more electrical connections, a first surface, and a second surface, wherein
the electrical connections are exposed at the first surface and the second surface,
the MEMS dies are connected to the first surface, and
the integrated circuit is electrically connected to the second surface.
3. The system of claim 1 , wherein the one or more protrusions are attached to the top side of each of the MEMS dies, wherein said protrusions contain one or more electrical connections that are electrically connected to said MEMS dies.
4. The system of claim 1 , wherein the MEMS dies are exposed to one or more pressures, which are constantly monitored and updated.
5. The system of claim 1 , wherein instructions are stored on the one more integrated circuits, and wherein when the instructions, when executed, corrects for one or more errors in the output electrical voltages sent from the MEMS dies.
6. The system of claim 1 , wherein the base structure of the MEMS disk is of a ceramic material.
7. The system of claim 1 , wherein the integrated circuits act as transducers.
8. The system of claim 1 , wherein the integrated circuits act as transmitters.
9. The system of claim 1 , wherein the integrated circuits act as sensing elements.
10. The system of claim 1 , wherein the MEMS disk further comprises one or more electrical conductors electrically connected to the MEMS dies.
11. The system of claim 1 , wherein the compensate disk further comprises one or more electrical conductors electrically connected to the integrated circuit.
12. A method for measuring one or more pressures in a fluid, comprising the steps of:
attaching one or more MEMS dies to a base structure with one or more port openings, wherein each of the MEMS dies consists of a flat and solid top side and a bottom side having an open cavity, and each of the MEMS dies is attached and hermatically sealed to the MEMS disk at the bottom cavity side;
sending one or more electrical voltages to the top side of the MEMS dies;
keeping the top side free from any fluid pressure or mechanical compression;
exposing the cavity at the bottom side of the MEMS dies to the fluid, wherein the fluid is contained within the cavity;
detecting a change in electrical resistance in the MEMS dies; and
converting the change in electrical resistance to one or more pressure values at one or more integrated circuits.