Display device and manufacturing method thereof
View Patent ↗Provide is a display device that prevents adverse effects on pixel circuits, resulting from a process related to a sealing film, and a manufacturing method of the display device. A display device includes pixel circuits on a substrate and a sealing film having a multilayer structure on the pixel circuits. The sealing film includes a first layer being formed in contact with the pixel circuits and being made of a silicon-containing inorganic material. The first layer is a mixed film containing at least one component changing seamlessly in a stacking direction.
1. A display device comprising:
pixel circuits on a substrate; and
a sealing film having a multilayer structure on the pixel circuits, the sealing film comprising a first layer being formed in contact with the pixel circuits and being made of a silicon-containing inorganic material, and a second layer being formed on at least part of a top of the first layer and being made of resin material,
wherein the first layer is a mixed film containing at least one component changing seamlessly in a stacking direction.
2. The display device according to claim 1 ,
wherein composition of the top of the first layer has higher adhesion to a bottom of the second layer than composition of a bottom of the first layer.
3. The display device according to claim 1 , wherein
the resin material of the second layer is an organic resin.
4. The display device according to claim 1 ,
wherein composition of a bottom of the first layer is one component selected from the group consisting of silicon nitride, silicon oxynitride, and silicon oxide.
5. The display device according to claim 1 , wherein
composition of a bottom of the first layer is silicon nitride, and
composition of a top of the first layer is one component selected from the group consisting of silicon oxide and amorphous silicon.
6. The display device according to claim 1 , wherein
the pixel circuits include an organic electroluminescence layer.
7. A manufacturing method of a display device, the method comprising:
forming pixel circuits on a substrate; and
forming a sealing film having a multilayer structure on the pixel circuits, the sealing film comprising a first layer being formed in contact with the pixel circuits and being made of a silicon-containing inorganic material,
wherein
the first layer is sequentially formed by changing at least one component of the first layer seamlessly in a stacking direction,
in a process for forming the first layer by chemical vapor deposition, types and flow rates of process gases flowing in are changed seamlessly,
the sealing film further includes a second layer made of a resin material, and
the second layer is formed on at least part of a top of the first layer.