Contacts for an N-type gallium and nitrogen substrate for optical devices
View Patent ↗A method for fabricating LED devices. The method includes providing a gallium and nitrogen containing substrate member (e.g., GaN) comprising a backside surface and a front side surface. The method includes subjecting the backside surface to a polishing process, causing a backside surface to be characterized by a surface roughness, subjecting the backside surface to an anisotropic etching process exposing various crystal planes to form a plurality of pyramid-like structures distributed spatially in a non-periodic manner on the backside surface, treating the backside surface comprising the plurality of pyramid-like structures, to a plasma species, and subjecting the backside surface to a surface treatment. The method further includes forming a contact material comprising an aluminum bearing species or a titanium bearing species overlying the surface-treated backside to form a plurality of LED devices with the contact material.
1. A method for roughening a semiconductor structure comprising at least a III-Nitride material and having at least one nitrogen-face side having an initial roughness, said method comprising:
contacting said side with at least one mixture containing an acid and an alkali hydroxide, thereby roughening said side to a second roughness, said second roughness being rougher than said initial roughness.
2. The method of claim 1 , wherein said alkali hydroxide comprises potassium hydroxide.
3. The method of claim 2 , wherein said acid is at least one of silicic acid, boric acid, chlorosulfonic acid, sulfamic acid.
4. The method of claim 3 , wherein said at least one mixture comprises at least potassium hydroxide and silicic acid.
5. The method of claim 1 , wherein said initial roughness has an RMS roughness lower than 100 nm.
6. The method of claim 1 , wherein said second roughness comprises at least a plurality of pyramid-like structures, having an apex and a base.
7. The method of claim 6 , wherein at least a portion of said pyramid-like structures have six sides extends from said apex to said base.
8. The method of claim 6 , wherein at least a portion of said pyramids have a nominal base dimension of about 5 um.
9. The method of claim 6 , wherein the bases of said pyramid-like structures are substantially contiguous to define a plane.
10. The method of claim 6 , wherein at least 80% of said pyramid-like structures have a base having a normalized size ranging from 0.3 to 3 relative to the median base size of said pyramid-like structures.
11. The method of claim 1 further comprising subsequently contacting said side with a second mixture containing at least one of an acid or an alkali hydroxide.
12. The method of claim 1 , wherein said at least one mixture comprises at least 0% to 20% by weight of silicic acid hydrate and 3% to 45% by weight of alkali hydroxide in water.
13. The method of claim 1 , wherein said at least one mixture contacts said side for at least 1 minute.
14. The method of claim 1 , wherein said at least one mixture contacts said side at between 0° C. and 100° C.
15. The method of claim 1 , wherein said contacting comprises continuously agitating said at least one mixture to provide uniformity of roughness.
16. The method of claim 1 , wherein said semiconductor structures comprises light-emitting layers.
17. The method of claim 1 , wherein said side is n-doped.
18. A semiconductor structure made from the method of claim 1 .
19. A semiconductor structure made from the method of claim 12 .