GRAPHENE MANUFACTURING APPARATUS AND METHOD
A graphene manufacturing apparatus includes a gas supplying unit supplying a gas including carbon; a gas heating unit heating the gas supplied from the gas supplying unit; a deposition chamber in which a substrate having a catalyst layer is disposed; and an inlet pipe introducing the gas of the gas heating unit into the deposition chamber. A temperature of the deposition chamber is set at a temperature lower than a temperature of the gas heating unit so that a selection range with respect to a catalyst metal to be used in the catalyst layer may be expanded, and damage of the substrate due to a high temperature heat may be minimized.
1 . A method of manufacturing graphene, the method comprising:
moving a substrate having a catalyst layer to a deposition chamber;
supplying a gas comprising carbon to a gas chamber separately disposed from the deposition chamber;
heating the gas to a temperature at which the carbon is separated from the gas; and
introducing the gas heated in the gas chamber into the deposition chamber, and synthesizing graphene on the substrate.
2 . The method of claim 1 , wherein the heating of the gas comprises heating the gas by radiating heat from a lamp disposed in the gas chamber.
3 . The method of claim 1 , wherein the supplying of the gas comprises supplying an atmosphere gas together with a reaction gas comprising carbon.
4 . The method of claim 3 , wherein the synthesizing of the graphene comprises dividing the reaction gas comprising carbon and the atmosphere gas, and then introducing only the reaction gas into the deposition chamber.
5 . The method of claim 1 , wherein the synthesizing of the graphene comprises heating the substrate introduced into the deposition chamber.
6 . The method of claim 5 , wherein the heating of the substrate comprises heating the substrate by radiating heat from a lamp disposed in the deposition chamber.
7 . The method of claim 6 , wherein the heating of the substrate comprises heating the substrate at a temperature lower than a temperature for heating the gas in the heating of the gas.