Temperature controlled acoustic resonator

1. An acoustic resonator device, comprising:

an acoustic resonator positioned over a trench formed in a substrate;

a heater coil disposed along a substantially entire perimeter of the acoustic resonator, the heater coil comprising a resistor configured to receive a heater current; and

a heat sensor configured to adjust the heater current in response to a temperature of the heater coil.

2. The acoustic resonator device of claim 1 , further comprising:

a plurality of tethers connected to the acoustic resonator, the plurality of tethers being configured to limit transfer of externally applied forces to the acoustic resonator.

3. The acoustic resonator device of claim 2 , wherein a first tether of the plurality of tethers comprises a first conductive trace for providing the heater current to the heater coil.

4. The acoustic resonator device of claim 3 , wherein a second tether of the plurality of tethers comprises a second conductive trace for providing heat sensor current to the heat sensor, a change in the temperature of the heater coil causing a corresponding change in sensor resistance of the heat sensor.

5. The acoustic resonator device of claim 4 , further comprising:

a reference resistor have a predetermined reference resistance; and

a transimpedance amplifier configured to sense a voltage caused by a difference between the sensor resistance and the predetermined reference resistance and to convert the sensed voltage into a bias current for adjusting the heater current.

6. The acoustic resonator device of claim 3 , wherein the first conductive trace for providing the heater current to the heater coil comprises a metal trace having a thickness of about 300 Å to about 1000 Å, and wherein the heater coil comprises a heater resistor having a resistance between about 100Ω and about 5000Ω.

7. The acoustic resonator device of claim 6 , wherein the metal trace of the heater coil comprises at least one of molybdenum, tungsten and ruthenium.

8. The acoustic resonator device of claim 3 , wherein the first tether comprises:

a membrane, the first conductive trace being formed on a first surface of the membrane; and

a second conductive trace formed on a second surface of the membrane, opposite the first surface, the second conductive trace being configured to provide a return path for the heater current, wherein the membrane defines a via through which the first conductive trace being formed on the first surface of the membrane electrically connects with the heater coil.

9. The acoustic resonator device of claim 2 , wherein the plurality of tethers includes four tethers, each tether being approximately equal in length and having two lever arms, and each lever arm extending along approximately one quarter of a circumference of the acoustic resonator.

10. The acoustic resonator device of claim 2 , wherein the plurality of tethers includes two tethers, each tether being approximately equal in length and having two lever arms, and each lever arm extending along approximately one half of a circumference of the acoustic resonator.

11. The acoustic resonator device of claim 1 , wherein the heat sensor is disposed along the substantially entire perimeter of the acoustic resonator substantially adjacent to the heater coil.

12. The acoustic resonator device of claim 1 , wherein the acoustic resonator is annular, the acoustic resonator device further comprising:

a pillar formed in the trench, the pillar supporting the acoustic resonator at a central location; and

a conductor wound around the pillar for providing the heater current to the heater coil,

wherein the heater coil is disposed around an inner perimeter of the acoustic resonator.

13. An acoustic resonator device, comprising:

a substrate incorporating a trench;

an acoustic resonator suspended over the trench, the acoustic resonator comprising a first electrode, a piezoelectric layer stacked on the first electrode and a second electrode stacked on the piezoelectric layer, a portion of the piezoelectric layer extending beyond an outer edge of the first electrode;

a heater coil disposed along a substantially entire perimeter of the acoustic resonator on a first surface of the portion of the piezoelectric layer extending past the outer edge of the first electrode;

a heat sensor disposed along the substantially entire perimeter of the acoustic resonator on a second surface of the portion of the piezoelectric layer extending beyond the outer edge of the first electrode, and opposite the first surface, wherein the heat sensor is configured to adjust heater current to the heater coil based on a temperature of the heater coil;

a pillar disposed in the trench, the pillar supporting the acoustic resonator at a central location, the pillar comprising; and

a set of electrical contacts formed in the trench.

14. The acoustic resonator device of claim 13 , further comprising:

a plurality of tethers connected to the substantially entire perimeter of the acoustic resonator and configured to suspend the acoustic resonator over the trench, a first tether of the plurality of tethers comprising a first conductive trace for providing heater current to the heater coil and a second tether of the plurality of tethers comprising a second conductive trace for providing heat sensor current to the heat sensor.

15. The acoustic resonator device of claim 14 , further comprising:

an inner heater coil and an inner heat sensor disposed along an inner perimeter of the acoustic resonator;

a third conductive trace for providing inner heater current to the inner heater coil; and

a fourth conductive trace for providing inner heat sensor current to the inner heat sensor.

16. The acoustic resonator device of claim 15 , wherein each of the third conductive trace and the fourth conductive trace wrap around the pillar formed in the trench.

17. The acoustic resonator device of claim 13 , further comprising:

a reference resistor having a predetermined reference resistance, wherein the heat sensor is configured to compare the predetermined reference resistance and a sensor resistance of the heat sensor, wherein the sensor resistance varies according to the temperature of one of the heater coil and the piezoelectric layer of the acoustic resonator.

18. The acoustic resonator device of claim 17 , wherein the heat sensor is further configured to provide a sensed voltage based on a difference between the predetermined reference resistance and the sensor resistance, and to convert the sensed voltage to a bias current for adjusting the heater current.