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App. No. 14/847,735 · Confirmation No. 9033

SEMICONDUCTOR MANUFACTURING APPARATUS

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2021-01-26 ABN Abandonment 2 View
2020-07-08 CTFR Final Rejection 8 View
2020-07-08 892 List of references cited by examiner 1 View
2020-07-08 SRFW Search information including classification, databases and other search related notes 2 View
2020-07-08 SRNT Examiner's search strategy and results 6 View
2020-06-23 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 1 View
2020-06-23 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2020-06-23 OA.APPENDIX Office Action Appendix 5 View
2020-06-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2020-06-15 CLM Claims 3 View
2020-06-15 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2020-06-15 N417 Electronic Filing System Acknowledgment Receipt 2 View
2020-06-15 TRAN.LET Transmittal Letter 1 View
2020-06-15 WFEE Fee Worksheet (SB06) 1 View
2020-05-18 M865E Electronic Request for Interview with Examiner 1 View
2020-04-07 CTNF Non-Final Rejection 8 View
2020-04-07 892 List of references cited by examiner 1 View
2020-04-07 SRFW Search information including classification, databases and other search related notes 2 View
2020-04-07 SRNT Examiner's search strategy and results 5 View
2020-01-15 RCEX Request for Continued Examination (RCE) 1 View
2020-01-15 WFEE Fee Worksheet (SB06) 2 View
2020-01-15 N417 Electronic Filing System Acknowledgment Receipt 3 View
2020-01-15 DRW Drawings-only black and white line drawings 2 View
2020-01-15 TRAN.LET Transmittal Letter 1 View
2020-01-15 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2020-01-15 CLM Claims 2 View
2020-01-15 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2019-10-16 CTFR Final Rejection 12 View
2019-10-16 SRFW Search information including classification, databases and other search related notes 2 View
2019-10-16 SRNT Examiner's search strategy and results 5 View
2019-07-01 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 1 View
2019-07-01 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2019-07-01 OA.APPENDIX Office Action Appendix 4 View
2019-06-26 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2019-06-26 CLM Claims 3 View
2019-06-26 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2019-06-26 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-06-26 TRAN.LET Transmittal Letter 1 View
2019-06-26 WFEE Fee Worksheet (SB06) 1 View
2019-05-28 M865E Electronic Request for Interview with Examiner 1 View
2019-04-22 CTNF Non-Final Rejection 11 View
2019-04-22 892 List of references cited by examiner 1 View
2019-04-22 SRFW Search information including classification, databases and other search related notes 2 View
2019-04-22 SRNT Examiner's search strategy and results 5 View
2019-02-04 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2019-02-04 CLM Claims 5 View
2019-02-04 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2019-02-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2019-02-04 TRAN.LET Transmittal Letter 1 View
2019-01-11 TRAN.LET Transmittal Letter 1 View
2019-01-11 INTRVIEW.APP Applicant summary of interview with examiner 2 View
2019-01-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-12-13 INTV.SUM.APP Applicant Initiated Interview Summary (PTOL-413) 1 View
2018-12-13 EXIN Examiner Interview Summary Record (PTOL - 413) 2 View
2018-12-04 CPA-AMD Notice of Informal or Non-Responsive Continued Prosecution Application (CPA) Amendment 1 View
2018-12-04 NTC.A.NONCPL Notice to the applicant regarding a non-compliant or non-responsive amendment 2 View
2018-11-09 RCEX Request for Continued Examination (RCE) 1 View
2018-11-09 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2018-11-09 CLM Claims 5 View
2018-11-09 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2018-11-09 WFEE Fee Worksheet (SB06) 2 View
2018-11-09 N417 Electronic Filing System Acknowledgment Receipt 3 View
2018-11-09 WFEE Fee Worksheet (SB06) 1 View
2018-08-27 CTFR Final Rejection 15 View
2018-08-27 SRFW Search information including classification, databases and other search related notes 1 View
2018-08-27 SRNT Examiner's search strategy and results 5 View
2018-04-24 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2018-04-24 CLM Claims 4 View
2018-04-24 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2018-04-24 N417 Electronic Filing System Acknowledgment Receipt 2 View
2018-04-24 TRAN.LET Transmittal Letter 1 View
2018-04-24 WFEE Fee Worksheet (SB06) 1 View
2018-01-30 SRNT Examiner's search strategy and results 5 View
2018-01-30 SRFW Search information including classification, databases and other search related notes 1 View
2018-01-30 892 List of references cited by examiner 1 View
2018-01-30 BIB Bibliographic Data Sheet 1 View
2018-01-30 1449 List of References cited by applicant and considered by examiner 1 View
2018-01-30 CTNF Non-Final Rejection 12 View
2017-07-18 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2017-07-18 APP.FILE.REC Filing Receipt 3 View
2017-07-13 PA.. Power of Attorney 2 View
2017-07-13 R3.73 Assignee showing of ownership per 37 CFR 3.73 6 View
2017-07-13 ADS Application Data Sheet 6 View
2017-07-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2016-08-18 NTC.PUB Notice of Publication 1 View
2015-10-09 APP.FILE.REC Filing Receipt 3 View
2015-10-09 WFEE Fee Worksheet (SB06) 1 View
2015-10-01 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2015-10-01 PEFR Applicant Response to Pre-Exam Formalities Notice 1 View
2015-10-01 N417 Electronic Filing System Acknowledgment Receipt 2 View
2015-09-23 APP.FILE.REC Filing Receipt 3 View
2015-09-23 NTC.MISS.PRT Notice to File Missing Parts 2 View
2015-09-23 WFEE Fee Worksheet (SB06) 1 View
2015-09-08 TRNA Transmittal of New Application 1 View
2015-09-08 ADS Application Data Sheet 5 View
2015-09-08 SPEC Specification 13 View
2015-09-08 CLM Claims 3 View
2015-09-08 ABST Abstract 1 View
2015-09-08 DRW Drawings-only black and white line drawings 6 View
2015-09-08 OATH Oath or Declaration filed 2 View
2015-09-08 PA.. Power of Attorney 2 View
2015-09-08 TRAN.LET Transmittal Letter 1 View
2015-09-08 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2015-09-08 FOR Foreign Reference 12 View
2015-09-08 FOR Foreign Reference 9 View
2015-09-08 FOR Foreign Reference 28 View
2015-09-08 FOR Foreign Reference 6 View
2015-09-08 FOR Foreign Reference 4 View
2015-09-08 WFEE Fee Worksheet (SB06) 2 View
2015-09-08 N417 Electronic Filing System Acknowledgment Receipt 3 View
2015-09-08 OATH Oath or Declaration filed 3 View
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Quick Facts
App. No.
14/847,735
Filed
2015-09-08
Pub. No.
US20160237569A1
Art Unit
1716