IP Library Granted Patent US 10,566,517
Granted Patent B1
US 10,566,517 · App. 14/851,560 · Granted Feb 18, 2020

Staggering of openings in electrodes for crack mitigation

Inventors: Robert J. Littrell (Boston, MA); Karl Grosh (Boston, MA)
Assignee: Vesper Technologies Inc.
H01L41/0838B06B1/064H01L21/02104H01L41/0471
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Quick Facts
Patent No.
US 10,566,517
App. No.
14/851,560
Granted
Feb 18, 2020
Kind
B1
Abstract

A transducer comprising: at least one piezoelectric layer; a first patterned conductive layer that is patterned with a first opening; a second patterned conductive layer that is patterned with a second opening; wherein at least one piezoelectric layer is between the first and the second patterned conductive layers in a stack; and wherein a position of the first opening is staggered relative to a position of the second opening in the stack to mitigate an occurrence of crack propagation through the layers.

Claims (24)

1. A transducer comprising:

at least one piezoelectric layer;

a first patterned conductive layer that is patterned with a first opening;

a second patterned conductive layer that is patterned with a second opening;

wherein at least one piezoelectric layer is between the first and the second patterned conductive layers in a stack; and

wherein a position of the first opening is staggered relative to a position of the second opening in the stack such that a vertical traversal between the first and second openings is against a grain of piezoelectric material in the at least one piezoelectric layer to mitigate an occurrence of crack propagation through the layers.

2. The transducer of claim 1 , wherein the first and second patterned conductive layers are patterned on a moving portion of a transducer to generate more than four sensor elements on the transducer.

3. The transducer of claim 2 , wherein a transducer includes a sensor element that comprises more than sixty-percent piezoelectric material.

4. The transducer of claim 1 , wherein each of the first and second conductive layers are electrodes, wherein the first and second openings are staggered about an axis that represents a substantially optimal point for breaking the electrodes to increase an amount of output energy of a transducer.

5. The transducer of claim 1 , wherein an angle formed by a line representing the vertical traversal and a base of a conductive layer is less than or greater than an angle at which a crack propagates through the at least one piezoelectric layer.

6. The transducer of claim 1 , wherein a transducer is an acoustic transducer, a microphone or a piezoelectric MEMS transducer.

7. The transducer of claim 1 , wherein each of the first and second openings have a width of substantially six microns.

8. A transducer comprising:

at least one piezoelectric layer;

a first conductive layer with a first opening; and

a second conductive layer with a second opening;

wherein the at least one piezoelectric layer is between the first and the second conductive layers; and

wherein a vertical traversal between the first and second openings is against a grain of piezoelectric material in the at least one piezoelectric layer.

9. The transducer of claim 8 , wherein the first and second conductive layers are patterned on a moving portion of a transducer to generate more than four sensor elements on the transducer.

10. The transducer of claim 8 , wherein a transducer includes a sensor element that comprises more than sixty-percent piezoelectric material.

11. The transducer of claim 8 , wherein each of the first and second layers are electrodes, wherein the first and second openings are staggered about an axis that represents a substantially optimal point for breaking the electrodes to increase an amount of output energy of a transducer.

12. The transducer of claim 8 , wherein an angle formed by a line representing the vertical traversal and a base of a conductive layer is less than or greater than an angle at which a crack propagates through the at least one piezoelectric layer.

13. The transducer of claim 8 , wherein a transducer is an acoustic transducer, a microphone or a piezoelectric MEMS transducer.

14. The transducer of claim 8 , wherein each of the first and second openings have a width of substantially six microns.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 3, 2025
From: QUALCOMM TECHNOLOGIES, INC.
To: QUALCOMM INCORPORATED
Reel/Frame 069818/0431 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 13, 2022
From: VESPER TECHNOLOGIES INC.
To: QUALCOMM TECHNOLOGIES, INC.
Reel/Frame 061424/0533 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 10, 2015
From: LITTRELL, ROBERT J.; GROSH, KARL
To: VESPER TECHNOLOGIES INC.
Reel/Frame 036999/0437 →
Continuity (1)
Provisional Application 62049091 · Sep 11, 2014
Cited By (1)
US 12,610,744