Method for reusing a substrate for making light-emitting device
View Patent ↗A method for making a light-emitting device is provided. The method comprises the steps of providing a substrate, forming a nucleation layer on the substrate, forming a semiconductor stack on the nucleation layer, and separating the semiconductor stack from the nucleation layer to expose the nucleation layer.
1. A method for reusing a substrate for making a light-emitting device, comprising the steps of:
(a) providing a substrate;
(b) forming a nucleation layer on the substrate;
(c) forming a semiconductor stack on the nucleation layer; and
(d) separating the semiconductor stack from the nucleation layer to expose the nucleation layer; wherein the method further comprises a step of forming a sacrificial layer on the nucleation layer before the step (c), and the sacrificial layer comprises group III-arsenide.
2. The method according to claim 1 , wherein the sacrificial layer has a thickness between 10 nm and 1000 nm.
3. The method according to claim 1 , wherein the sacrificial layer comprises Al x Ga 1-x As, and 0≦x≦1.
4. The method according to claim 1 , wherein the step of separating the semiconductor stack from the nucleation layer to expose the nucleation layer is by removing the sacrificial layer.
5. The method according to claim 4 , wherein the step of removing the sacrificial layer is by using a solution comprising HF.
6. The method according to claim 1 , further comprising a step of treating a top surface of the nucleation layer after the step (d).
7. The method according to claim 5 , wherein the step of treating the top surface of the nucleation layer is by using an acid solution to remove byproducts formed on the top surface of the nucleation layer.
8. The method according to claim 1 , further comprising a step of forming a protecting layer on the nucleation layer after the step (d).
9. The method according to claim 8 , further comprising a step of removing the protecting layer to expose the nucleation layer.
10. The method according to claim 8 , wherein the protecting layer comprises multiple layers.
11. The method according to claim 9 , further comprising a step of treating an exposed surface of the nucleation layer after the step of removing the protecting layer.
12. The method according to claim 11 , wherein the step of treating the surface of the exposed surface of the nucleation layer is by using an acid solution.
13. The method according to claim 10 , wherein the step of removing the protecting layer is by using a solution comprising a mixture of H 2 O 2 and NH 4 OH or a mixture of citric acid and H 2 O 2 .
14. The method according to claim 9 , wherein the protecting layer comprises a group III-arsenide.
15. The method according to claim 1 , further comprising repeating the steps of (c) through (d).
16. The method according to claim 1 , wherein the nucleation layer comprises (Al y Ga (1-y) ) 1-x In x P, wherein 0≦x≦1, 0≦y≦1.
17. The method according to claim 1 , wherein the nucleation layer comprises (Al y Ga (1-y) ) 1-x In x P, wherein 0.4≦x≦0.6, 0≦y≦0.6.
18. The method according to claim 1 , wherein the nucleation layer has a thickness between 3 nm and 1500 nm.
19. A method for reusing a substrate for making a light-emitting device, comprising the steps of:
(a) providing a substrate;
(b) forming a nucleation layer on the substrate;
(c) forming a semiconductor stack on the nucleation layer; and
(d) separating the semiconductor stack from the nucleation layer to expose the nucleation layer; wherein the nucleation layer comprises (Al y Ga (1-y) ) 1-x In x P, wherein 0≦x≦1, 0≦y≦1.
20. The method according to claim 19 , wherein the nucleation layer comprises (Al y Ga (1-y) ) 1-x In x P, wherein 0.4≦x≦0.6, 0≦y≦0.6.