Organic light-emitting device including barrier layer including silicon oxide layer and silicon nitride layer
View Patent ↗An organic light-emitting device including a barrier layer that includes a silicon oxide layer and a silicon-rich silicon nitride layer. The organic light-emitting device includes a flexible substrate that includes a barrier layer and plastic films disposed under and over the barrier layer. The barrier layer includes a silicon-rich silicon nitride layer and a silicon oxide layer. The order in which the silicon-rich silicon nitride layer and the silicon oxide layer are stacked is not limited and the silicon oxide layer may be first formed and then the silicon-rich silicon nitride layer may be stacked on the silicon oxide layer. The silicon-rich silicon nitride layer has a refractive index of 1.81 to 1.85.
1. An organic light-emitting device comprising:
a plastic film;
a first barrier layer on the plastic film and the first barrier layer comprises a first silicon oxide layer and a first silicon nitride layer;
a second barrier layer on the first barrier layer and the second barrier layer comprises a second silicon oxide layer and a second silicon nitride layer;
a thin film transistor (TFT) on the second barrier layer;
an organic emission layer on the second barrier layer and the organic emission layer is connected to the TFT, and
a further silicon oxide layer that is arranged between the first barrier layer and the second barrier layer,
the second silicon oxide layer being closer to the TFT than the second silicon nitride layer is,
the first silicon oxide layer being closer to the plastic film than the first silicon nitride layer,
a total thickness of silicon nitride layers included in the first barrier layer and the second barrier layer being less than a total thickness of silicon oxide layers included in the first barrier layer and the second barrier layer.
2. The organic light-emitting device of claim 1 , wherein the second silicon oxide layer is thicker than the first silicon oxide layer.
3. The organic light-emitting device of claim 1 , wherein the second silicon oxide layer is thicker than the further silicon oxide layer.
4. The organic light-emitting device of claim 1 , wherein the second silicon oxide layer is thicker than the second silicon nitride layer.
5. The organic light-emitting device of claim 1 , wherein the second silicon oxide layer is thicker than the first silicon nitride layer.
6. The organic light-emitting device of claim 1 , wherein the first silicon oxide, the first silicon nitride layer, the further silicon oxide layer, the second nitride layer, and the second silicon oxide layer are arranged in the stated order from the plastic film toward the TFT.
7. The organic light-emitting device of claim 1 , wherein the total thickness of the first barrier layer, the second barrier layer, and the further silicon oxide layer ranges from about 120 nm to about 2000 nm.
8. The organic light-emitting device of claim 1 , wherein the first barrier layer, the second barrier layer, and the further silicon oxide layer are formed by at least one of chemical vapor deposition (CVD), plasma enhanced chemical vapor deposition (PECVD), and atomic layer deposition (ALD).