Triboelectric energy harvester including coating electrification layer and manufacturing method thereof
View Patent ↗A manufacturing method of a triboelectric energy harvester, including the steps of generating an electrification material with a surface of a micro-nano pattern on an electrode and forming a coating electrification layer to support the micro-nano pattern on a surface of the electrification material, is provided.
1. A manufacturing method of a triboelectric energy harvester, the method comprising:
generating an electrification material with a surface of a micro-nano pattern on an electrode; and
forming a coating electrification layer to support the micro-nano pattern on a surface of the electrification material.
2. The manufacturing method of claim 1 , wherein the forming of the coating electrification layer comprises:
forming the coating electrification layer on the surface of the electrification material by using at least one of ICVD or SAM.
3. The manufacturing method of claim 1 , wherein the forming of the coating electrification layer comprises:
forming the coating electrification layer with a material that is higher than the electrification material in triboelectric charge density.
4. The manufacturing method of claim 3 , wherein the forming of the coating electrification layer comprises:
forming the coating electrification layer with at least one of polymer, organic material, or dielectric material superior in step coverage to support the micro-nano pattern.
5. The manufacturing method of claim 1 , wherein the forming of the coating electrification layer comprises:
forming the coating electrification layer to have a plurality of layers on the surface of the electrification material.
6. A triboelectric energy harvester having a coating electrification layer, comprising:
an electrode;
an electrification material generated on the electrode and configured to have a surface of a micro-nano pattern; and
a coating electrification layer formed on the surface of the electrification material.
7. The triboelectric energy harvester of claim 6 , wherein the coating electrification layer is formed on the surface of the electrification material by using at least one of ICVD or SAM.
8. The triboelectric energy harvester of claim 6 , wherein the coating electrification layer is formed with a material that is higher than the electrification material in triboelectric charge density.
9. The triboelectric energy harvester of claim 8 , wherein the coating electrification layer is formed with at least one of polymer, organic material, or dielectric material superior in step coverage to support the micro-nano pattern.
10. The triboelectric energy harvester of claim 6 , wherein the coating electrification layer is formed to have a plurality of layers on the surface of the electrification material.