Semiconductor device
View Patent ↗A method for manufacturing a semiconductor device includes, forming, on a substrate, an element isolation insulating film which includes a protruding portion protruding above a level of a surface of the substrate, forming a first film on the substrate and on the element isolation insulating film, polishing the first film to expose the protruding portion, forming a first resist pattern which straddles the first film and the protruding portion after polishing the first film, patterning the first film using the first resist pattern as a mask to form a first pattern, and forming a sidewall film at side surfaces of the first pattern.
1. A semiconductor device comprising:
a substrate;
an element isolation insulating film formed on the substrate, and including a protruding portion protruding above a level of a surface of the substrate;
a gate insulating film formed on the substrate;
a gate electrode formed on the gate insulating film; and
a sidewall film formed at side surfaces of the gate electrode in a gate length direction of the gate electrode,
wherein a side surface of the gate electrode in a gate width direction of the gate electrode is covered with the protruding portion.
2. The semiconductor device according to claim 1 , wherein
the substrate includes a projecting portion which projects upward from the surface of the substrate,
the gate insulating film is formed on an upper surface and on side surfaces of the projecting portion so as to straddle the projecting portion, and
the gate electrode is formed on the gate insulating film so as to straddle the projecting portion.