Semiconductor structure and fabricating method thereof
A semiconductor structure and a method of fabricating the semiconductor structure are disclosed herein. The semiconductor structure includes a substrate, a strain-inducing layer and an epitaxy structure. The strain-inducing layer is disposed on the substrate, and the epitaxy structure is embedded in the strain-inducing layer and not in contact with the substrate.
1. A semiconductor structure, comprising:
a substrate;
a strain-inducing layer disposed on the substrate;
a gate dielectric layer disposed on the strain-inducing layer, wherein the gate dielectric layer and the strain-inducing layer are in contact;
a gate electrode disposed on the gate dielectric layer; and
an epitaxy structure embedded in the strain-inducing layer and not in contact with the substrate, wherein a portion of the strain-inducing layer is disposed between the epitaxy structure and the substrate.
2. The semiconductor structure of claim 1 , wherein the strain-inducing layer and the epitaxy structure comprises germanium (Ge), silicon germanium (SiGe), or a combination thereof.
3. The semiconductor structure of claim 2 , wherein the strain-inducing layer and the epitaxy structure are formed of silicon germanium.
4. The semiconductor structure of claim 3 , wherein the silicon germanium of the epitaxy structure is higher than the silicon germanium of the strain-inducing layer in germanium percentage.
5. The semiconductor structure of claim 3 , further comprising a cap layer on the epitaxy structure.
6. The semiconductor structure of claim 5 , wherein the cap layer is formed of silicon germanium, and the silicon germanium of the epitaxy structure is higher than the silicon germanium of the cap layer in germanium percentage.
7. The semiconductor structure of claim 3 , wherein the epitaxy structure is a bi-layer structure, comprising:
a first portion; and
a second portion surrounding the first portion and in contact with the strain-inducing layer, and the silicon germanium of the first portion is higher than the silicon germanium of the second portion in germanium percentage.
8. The semiconductor structure of claim 3 , wherein the silicon germanium of the epitaxy structure is gradiently increased in germanium percentage from an interface between the epitaxy structure and the strain-inducing layer to a top surface of the epitaxy structure.
9. The semiconductor structure of claim 1 , wherein a thickness of the epitaxy structure is in a range from about 50% to 80% of a thickness of the strain-inducing layer.
10. The semiconductor structure of claim 9 , wherein the thickness of the strain-inducing layer is in a range from about 40 nm to about 60 nm.
11. The semiconductor structure of claim 9 , wherein the thickness of the epitaxy structure is in a range from about 20 nm to about 50 nm.
12. The semiconductor structure of claim 1 , wherein the strain-inducing layer is stretched or compressed in view of the substrate.
13. The semiconductor structure of claim 1 , wherein the substrate and the strain-inducing layer are formed of different materials having different lattice constants.
14. The semiconductor structure of claim 1 , wherein the strain-inducing layer comprises lightly doped source/drain (LDD) regions.
15. The semiconductor structure of claim 14 , wherein the doped regions are doped with p-type dopants to form p-typed lightly doped source/drain (PLDD) regions, doped with n-type dopants to form n-typed lightly doped source/drain (NLDD) regions, or doped both with p-typed and n-typed dopants to form both PLDD and NLDD regions.
16. The semiconductor structure of claim 1 , wherein a thickness of the epitaxy structure is smaller than a thickness of the strain-inducing layer.
17. A semiconductor structure, comprising:
a substrate;
a strain-inducing layer disposed on the substrate;
a gate dielectric layer disposed on the strain-inducing layer, wherein the gate dielectric layer and the strain-inducing layer are in contact;
a gate electrode disposed on the gate dielectric layer; and
an epitaxy structure embedded in the strain-inducing layer, wherein the epitaxy structure is separated from the substrate by a portion of the strain-inducing layer.
18. The semiconductor structure of claim 17 , wherein the substrate and the strain-inducing layer have different lattice constants.
19. The semiconductor structure of claim 18 , wherein the epitaxy structure comprises silicon germanium, and the silicon germanium of the epitaxy structure is gradiently increased in germanium percentage from an interface between the epitaxy structure and the strain-inducing layer to a top surface of the epitaxy structure.
20. A semiconductor structure, comprising:
a substrate;
a strain-inducing layer disposed on the substrate;
an epitaxy structure embedded in the strain-inducing layer and not in contact with the substrate, wherein the epitaxy structure comprises silicon germanium; and
a cap layer on the epitaxy structure, wherein the cap layer comprises silicon germanium, and the silicon germanium of the epitaxy structure is higher than the silicon germanium of the cap layer in germanium percentage.