Method for fabricating a magnetic writer having a gradient in saturation magnetization of the shields
View Patent ↗A method provides a magnetic transducer having a media-facing surface (MFS). The method includes providing a pole, providing a side gap, providing coil(s) for energizing the pole and providing side shield(s). A portion of the pole resides at the MFS. The side gap is between the pole and the side shield(s). The side shield(s) have a gradient in a saturation magnetization such that the saturation magnetization increases in a yoke direction perpendicular to the MFS. The step of providing the side shield(s) further includes providing a nonmagnetic structure having a side surface parallel to the MFS and providing at least one side shield layer. A portion of the side shield layer(s) are on the side surface. The portion of the side shield layer(s) has the gradient in the saturation magnetization. At least part of the side shield being formed by the portion of the side shield layer(s).
1. A method for providing a magnetic transducer having media-facing surface (MFS) comprising:
providing a pole, wherein a portion of the pole resides at the WS;
providing a side gap;
providing at least one coil for energizing the main pole; and
providing a side shield, wherein the side gap is between the pole and the side shield, wherein the side shield has a gradient in a saturation magnetization such that the saturation magnetization changes in a yoke direction perpendicular to the WS, wherein the providing the side shield further includes:
providing a nonmagnetic structure having a side surface parallel to the WS;
providing at least one side shield layer, wherein a portion of the at least one side shield layer resides on the side surface, wherein the portion of the at least one side shield layer has the gradient in the saturation magnetization, and wherein at least part of the side shield is formed by the portion of the at least one side shield layer.
2. The method of claim 1 wherein the providing the at least one side shield layer includes conformally depositing the at least one side shield layer.
3. The method of claim 1 wherein the providing the side shield further includes:
depositing a seed layer before the providing the nonmagnetic structure.
4. The method of claim 3 wherein the depositing the at least one side shield layer further includes:
plating the at least side shield layer on the seed layer and the nonmagnetic structure.
5. The method of claim 4 wherein the plating the at least one side shield layer further includes:
plating a layer having a varying concentration of at least one magnetic material to provide the gradient in the saturation magnetization.
6. The method of claim 5 wherein the plating the layer occurs in a single plating cell.
7. The method of claim 1 wherein the at least one side shield layer includes a plurality of side shield layers, each of the plurality of side shield layers having a different saturation magnetization than another layer of the plurality of side shield layers.
8. The method of claim 1 wherein the gradient in the saturation magnetization is configured such that the saturation magnetization increases monotonically in the yoke direction.
9. The method of claim 1 wherein the nonmagnetic structure includes a top surface, an additional portion of the at least one side shield layer residing on the top surface, the providing the side shield further including:
depositing at least one nonmagnetic insulating layer; and
planarizing the at least one side shield layer and the at least one nonmagnetic insulating layer.
10. The method of claim 1 wherein the nonmagnetic structure is formed of a nonmagnetic metal.
11. The method of claim 10 wherein the nonmagnetic metal includes at least one of NiP, Cu, Ru, and NiCr.
12. The method of claim 1 wherein the providing the side gap includes:
removing a first portion of the at least one side shield layer to form a trench therein, a second portion of the at least one side shield layer forming the side shield; and
depositing at least one side gap layer, a portion of the at least one side gap layer residing in the trench.
13. The method of claim 12 wherein the providing the pole further includes:
depositing at least one pole material, a first portion of the at least one pole;
material residing in the trench and forming the pole; and
removing a second portion of the at least one pole material external to the trench.
14. The method of claim 13 wherein a third portion of the at least one side shield material in the trench below the pole forms a leading shield.
15. The method of claim 1 further comprising:
providing a leading shield; and
providing a trailing shield such that the leading shield, the trailing shield and the side shield form a wraparound shield.
16. The method of claim 1 wherein the saturation magnetization increases with increasing distance from the ABS.
17. The method of claim 1 wherein the saturation magnetization decreases with increasing distance from the pole in a cross-track direction.
18. A method for providing a data storage device having an air-bearing surface (ABS) comprising:
depositing a seed layer;
providing a nonmagnetic metal structure on the seed layer, wherein the nonmagnetic metal structure has a side surface parallel to the ABS and a top surface;
removing an uncovered portion of the seed layer exposed by the nonmagnetic metal structure;
providing a mask covering a portion of the top surface of the nonmagnetic metal structure;
conformally depositing at least one side shield layer, wherein a first portion of the at least one side shield layer resides on the side surface, wherein the first portion of the at least one side shield layer has a gradient in the saturation magnetization such that the saturation magnetization changes in a yoke direction perpendicular to the ABS, wherein a second portion of the at least one side shield layer resides on a remaining portion of the top surface not covered by the mask;
removing the mask;
depositing at least one nonmagnetic insulating layer after the mask is removed, wherein the at least one nonmagnetic insulating layer covers at least the at least one side shield layer and the portion of the nonmagnetic metal structure;
planarizing the at least one side shield layer and the at least one nonmagnetic insulating layer such that the nonmagnetic metal structure is exposed;
removing a first portion of the at least one side shield layer and the nonmagnetic metal structure to form a trench therein, wherein a second portion of the at least one side shield layer forms a side shield;
depositing at least one side gap layer, wherein a first portion of the at least one side gap layer resides in the trench, and wherein a second portion of the at least one side gap layer resides external to the trench;
depositing at least one pole material, wherein a first portion of the at least one pole material resides in the trench and forming the pole;
removing a second portion of the at least one pole material external to the trench and a second portion of the at least one side gap material, wherein the first portion of the at least one pole material forms the pole, wherein the first portion of the at least one side gap layer forms the side gap, and wherein a third portion of the at least one side shield layer below the pole forms a leading shield;
providing a write gap on a top of at least part of the pole; and
providing at least one coil for energizing the pole.
19. The method of claim 18 further comprising:
providing a trailing shield such that the leading shield, the trailing shield and the side shield form a wraparound shield.