PLZT capacitor on glass substrate
View Patent ↗A lead-lanthanum-zirconium-titanate (PLZT) capacitor on a substrate formed of glass. The first metallization layer is deposited on a top side of the substrate to form a first electrode. The dielectric layer of PLZT is deposited over the first metallization layer. The second metallization layer deposited over the dielectric layer to form a second electrode. The glass substrate is advantageous as glass is compatible with an annealing process used to form the capacitor.
1. A capacitor comprising:
a substrate formed of glass;
a first metallization layer deposited on a top side of the substrate to form a first electrode;
a dielectric layer formed of lead-lanthanum-zirconium-titanate (PLZT) deposited over the first metallization layer; and
a second metallization layer deposited over the dielectric layer to form a second electrode.
2. The capacitor in accordance with claim 1 , wherein the glass includes a concentration of sodium (Na) less than ten parts-per-million (10 ppm).
3. The capacitor in accordance with claim 1 , wherein the glass has a thickness less than one-hundred micrometers (100 um).
4. The capacitor in accordance with claim 1 , wherein the first electrode is formed of one of platinum, nickel, copper, and aluminum.
5. The capacitor in accordance with claim 1 , wherein the second electrode is formed of one of platinum, nickel, copper, and aluminum.
6. The capacitor in accordance with claim 1 , wherein the capacitor includes
a third metallization layer deposited on a bottom side of the substrate to form a third electrode;
a second dielectric layer formed of lead-lanthanum-zirconium-titanate (PLZT) deposited over the third metallization layer; and
a fourth metallization layer deposited over the second dielectric layer to form a fourth electrode.