IP Library Granted Patent US 10,072,984
Granted Patent B2
US 10,072,984 · App. 14/874,378 · Granted Sep 11, 2018

Spectrometer

Inventors: Keith T. Carron (Centennial, WY); Shane A. Buller (Laramie, WY); Mark A. Watson (Laramie, WY); Sean Patrick Woodward (Laramie, WY)
Assignee: MKS Technology, Inc.
G01J3/4412G01J3/021G01J3/027G01J3/0208G01J3/0297G01J3/10G01J3/44G01N21/65G01N2021/4711G01N2201/068G01N2201/0612G01N2201/12
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Quick Facts
Patent No.
US 10,072,984
App. No.
14/874,378
Granted
Sep 11, 2018
Kind
B2
Abstract

Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.

Claims (42)

1. A spectrometer comprising:

a light source adapted to provide an excitation incident beam;

a detector adapted to detect a spectroscopy signal; and

an optical system adapted to direct the excitation incident beam toward an entry region of a sample including first and second layers at a non-zero angle from a zero-angle collection reference, receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector, wherein the entry region is offset from a collection region of the sample,

wherein the detector is adapted to remove a spectral interference component of the spectroscopy signal corresponding to at least one of the first and second layers.

2. The spectrometer of claim 1 wherein the detector is adapted to remove the spectral interference component through spectral subtraction.

3. The spectrometer of claim 1 wherein the detector is adapted to remove the spectral interference component through spectral subtraction of at least one known component.

4. The spectrometer of claim 1 wherein the detector is adapted to remove the spectral interference component through spectral subtraction of at least one known component stored in a library.

5. The spectrometer of claim 4 wherein the library stores spectral interference components of a plurality of known materials.

6. The spectrometer of claim 4 wherein the plurality of known materials includes a plurality of containers.

7. The spectrometer of claim 4 wherein the plurality of known materials includes a plurality of plastic containers.

8. The spectrometer of claim 1 wherein the detector is adapted to receive a plurality of spectroscopy signals from the sample.

9. The spectrometer of claim 8 wherein the plurality of spectroscopy signals correspond to a plurality of incident beams directed toward the sample at different angles and/or offsets from a zero-axis line, such as but not limited to the axis B shown in FIG. 13 .

10. A spectrometer comprising:

a light source adapted to provide an excitation incident beam;

a detector adapted to detect a spectroscopy signal; and

an optical system adapted to direct the excitation incident beam toward an entry region of a sample including first and second layers at a non-zero angle from a zero-axis collection reference, receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector, wherein the entry region is offset from a collection region of the sample,

wherein the detector is adapted to compare a plurality of spectroscopy signals corresponding to a plurality of incident beams directed toward the sample from a plurality of different non-zero angles and/or offsets from the zero-axis collection reference to identify at least one component of the spectroscopy signal corresponding to at least one of the first and second layers of the sample.

11. The spectrometer of claim 10 wherein the optical system is adapted to receive the spectroscopy signal at least generally along the zero-axis reference.

12. The spectrometer of claim 10 wherein the detector is adapted to identify the at least one component of the spectroscopy signal corresponding to the sample via spectral subtraction.

13. The spectrometer of claim 10 wherein the detector is adapted to identify the at least one component of the spectroscopy signal corresponding to the sample via spectral subtraction of at least one known component.

14. The spectrometer of claim 10 wherein the detector is adapted to identify the at least one component of the spectroscopy signal corresponding to the sample via spectral subtraction of at least one known component stored in a library.

15. The spectrometer of claim 14 wherein the library stores spectral interference components of a plurality of known materials.

16. The spectrometer of claim 14 wherein the plurality of known materials includes a plurality of containers.

17. The spectrometer of claim 14 wherein the plurality of known materials includes a plurality of plastic containers.

18. A method of measuring Raman scattering from layers within a sample comprising:

exciting Raman scattering at a nonzero angle relative to a normal angle of incidence relative to the sample via an excitation incident beam directed at an entry region of the sample offset from a collection region of the sample;

using multiple angles to interrogate the different depths corresponding to different layers within the sample;

collecting Raman spectra at the normal angle of incidence to the surface; and

using statistical methods to derive the different layers within the sample.

19. A method of measuring Raman scattering from layers within a sample comprising:

exciting Raman scattering by directing an excitation beam toward an entry region of the sample at a nonzero angle relative to a normal angle of incidence relative to the sample, wherein the entry region is offset from a collection region of the sample;

translating the using multiple angles to interrogate the different depths corresponding to different layers within the sample;

collecting Raman spectra at normal incidence to the surface; and

using statistical methods to derive the different layers within the sample.

20. The method of claim 19 wherein the operation of translating comprises translating a mirror along a translation axis to direct the excitation beam at the nonzero angle toward the sample from a plurality of locations.

21. A method of measuring Raman scattering from layers within a sample comprising:

exciting Raman scattering at a nonzero angle relative to a normal angle of incidence relative to the sample via an excitation incident beam directed at an entry region of the sample offset from a collection region of the sample;

collecting Raman spectra at the normal angle of incidence to the surface;

collecting a spectrum of a first layer without ingredients;

collecting a spectrum of the first layer and a second layer; and

determining a spectrum of the second layer through normalization against the spectrum of the first layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 26, 2023
From: MKS TECHNOLOGY, INC.
To: METROHM SPECTRO, INC. (D/B/A METROHM RAMAN)
Reel/Frame 064394/0335 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 25, 2018
From: CARRON, KEITH T.; BULLER, SHANE A.; WATSON, MARK A.; WOODWARD, SEAN PATRICK
To: MKS TECHNOLOGY, INC. (D/B/A SNOWY RANGE INSTRUMENTS)
Reel/Frame 046458/0244 →
Continuity (4)
Provisional Application 62058926 · Oct 2, 2014
Provisional Application 62192023 · Jul 13, 2015
Provisional Application 62234522 · Sep 29, 2015
Related Publication 20160223400A1 · Aug 4, 2016
Cited By (1)
US 12,339,165