High-voltage metal-oxide semiconductor transistor
The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.
1. A high-voltage metal-oxide-semiconductor (HVMOS) transistor, comprising:
a substrate;
a gate dielectric layer, disposed on the substrate, the gate dielectric layer comprising a protruded portion and a recessed portion, and the protruded portion being disposed at two sides of the recessed portioned and comprising a thickness greater than a thickness of the recessed portion;
a first doped region embedded in the substrate, wherein a border between the protruded portion and the recessed portion is vertically aligned with a side edge of the first doped region;
a gate electrode, disposed on the gate dielectric layer;
a spacer, disposed on a side wall of the gate electrode and contacted with the first doped region; and
a source and drain region, embedded in the substrate at two sides of the gate electrode.
2. The HVMOS transistor according to claim 1 , wherein the thickness of the protruded portion is substantially between 85 and 95 angstroms and the thickness of the recessed portion is substantially between 65 and 75 angstroms.
3. The HVMOS transistor according to claim 1 , wherein the first doped region overlaps the recessed portion in a horizontal direction.
4. The HVMOS transistor according to claim 1 , wherein the first doped region comprises a dopant of a first conductive type and the dopant comprises one of oxygen and fluorine.
5. The HVMOS transistor according to claim 1 , wherein the first doped region and the source and drain region comprises a same conductive type.
6. The HVMOS transistor according to claim 5 , wherein a doped concentration of the first doped region is less than a doped concentration of the source and drain region.
7. The HVMOS transistor according to claim 1 , wherein a side wall of the gate electrode is vertically aligned with a side wall of the gate dielectric layer.
8. The HVMOS transistor according to claim 1 , wherein a side wall of the gate electrode is not vertically aligned with a side wall of the gate dielectric layer.
9. The HVMOS transistor according to claim 1 , further comprising a spacer, disposed on a side wall of the gate electrode and on the protruded portion of the gate dielectric layer.
10. The HVMOS transistor according to claim 1 , further comprising a second doped region disposed between the first doped region and the source and drain region, and a side edge of the second doped region being vertically aligned with a side wall of the gate electrode.
11. The HVMOS transistor according to claim 10 , further comprising a spacer disposed on the side wall of the gate electrode and the spacer directly contacting with the second doped region.
12. The HVMOS transistor according to claim 10 , wherein a doped concentration of the second doped region is less than a doped concentration of the source and drain region.