Semiconductor TSV device package to which other semiconductor device package can be later attached
View Patent ↗A first package includes a laminate layer, an overmold layer above and in direct contact with the laminate layer, and a logic circuit-through-silicon via (TSV) layer including a first logic die and TSVs. The logic circuit-TSV layer is within the overmold layer, and the TSVs are electrically exposed at a top surface of the overmold layer. The first package may be fabricated and tested by a first party prior to being provided to a second party. A second package includes a second logic die. The second party may attach the second package to the first package at the electrically exposed TSVs of the first package to realize a complete and functional semiconductor device.
1. A method comprising:
fabricating a semiconductor device package including a laminate layer, an overmold layer above and in direct contact with the laminate layer, and a logic circuit-through-silicon via (TSV) layer having a logic die and a plurality of TSVs, the logic circuit-TSV layer within the overmold layer, the TSVs electrically exposed at a top surface of the overmold layer, comprising:
preparing the logic circuit-TSV layer including the logic die, comprising:
thinning a semiconductor wafer within which the TSVs are embedded to physically expose the TSVs at a side of the semiconductor wafer;
forming a plurality of contact pads at a side of the TSVs that will remain electrically exposed at the top surface of the overmold layer during the overmolding; and
forming a plurality of solder bumps on an opposite side of the TSVs that will be connected to the laminate layer during attachment of the logic circuit-TSV layer to the laminate layer;
attaching the logic circuit-TSV layer to the laminate layer;
overmolding the logic circuit-TSV layer as attached to the laminate layer while keeping the TSVs electrically exposed at the top surface of the overmold layer being formed;
forming a plurality of solder balls on a bottom surface of the laminate layer.
2. The method of claim 1 , further comprising testing the semiconductor device package to verify that the logic die therewithin is fully functional.
3. The method of claim 1 , wherein fabricating the semiconductor device package further comprises forming a plurality of through-mold vias (TMVs) within the overmold layer to one or more sides of the logic circuit-TSV layer.
4. A method comprising:
receiving a first semiconductor device package fabricated and tested, the first semiconductor device package including a laminate layer, an overmold layer above and in direct contact with the laminate layer, and a through-silicon via (TSV) layer having a first logic die and a plurality of TSVs, the logic circuit-TSV layer within the overmold layer, the TSVs electrically exposed at a top surface of the overmold layer; and
attaching a second semiconductor device package that has been fabricated and tested to the first semiconductor device package, the second semiconductor device package including a second logic die,
wherein the first semiconductor device package is fabricated prior to being received by:
preparing the logic circuit-TSV layer including the logic die, comprising:
thinning a semiconductor wafer within which the TSVs are embedded to physically expose the TSVs at a side of the semiconductor wafer;
forming a plurality of contact pads at a side of the TSVs that will remain electrically exposed at the top surface of the overmold layer during the overmolding; and
forming a plurality of solder bumps on an opposite side of the TSVs that will be connected to the laminate layer during attachment of the logic circuit-TSV layer to the laminate layer;
attaching the logic circuit-TSV layer to the laminate layer;
overmolding the logic circuit-TSV layer as attached to the laminate layer while keeping the TSVs electrically exposed at the top surface of the overmold layer being formed;
forming a plurality of solder balls on a bottom surface of the laminate layer.
5. The method of claim 4 , further comprising testing the first semiconductor device package prior to attaching the second semiconductor device package to the first semiconductor device package.
6. The method of claim 4 , wherein attaching the second semiconductor device package to the first semiconductor device package comprises electrically connecting a plurality of solder balls of the second semiconductor device package to the first semiconductor device package at the TSVs of the first semiconductor device package.
7. The method of claim 6 , wherein attaching the semiconductor device package to the first semiconductor device package further comprises forming an underfill layer between the first semiconductor device package and the second semiconductor device package to encapsulate the solder balls.
8. The method of claim 6 , wherein the first semiconductor device package further comprises a plurality of through-mold vias (TMVs) within the overmold layer to one or more sides of the logic circuit-TSV layer,
and attaching the semiconductor device package to the first semiconductor device package further comprises electrically connecting a plurality of additional second balls of the second semiconductor device package to the first semiconductor device package at the TMVs of the first semiconductor device package.
9. A method comprising:
fabricating a semiconductor device package including a laminate layer, an overmold layer above and in direct contact with the laminate layer, and a logic circuit-through-silicon via (TSV) layer having a logic die and a plurality of TSVs, the logic circuit-TSV layer within the overmold layer, the TSVs electrically exposed at a top surface of the overmold layer, including preparing the logic circuit-TSV layer including the logic die by:
thinning a semiconductor wafer within which the TSVs are embedded to physically expose the TSVs at a side of the semiconductor wafer;
forming a plurality of contact pads at a side of the TSVs that will remain electrically exposed at the top surface of the overmold layer during the overmolding; and
forming a plurality of solder bumps on an opposite side of the TSVs that will be connected to the laminate layer during attachment of the logic circuit-TSV layer to the laminate layer.
10. The method of claim 9 , further comprising testing the semiconductor device package to verify that the logic die therewithin is fully functional.
11. The method of claim 9 , wherein fabricating the semiconductor device package further comprises:
attaching the logic circuit-TSV layer to the laminate layer;
overmolding the logic circuit-TSV layer as attached to the laminate layer while keeping the TSVs electrically exposed at the top surface of the overmold layer being formed; and
forming a plurality of solder balls on a bottom surface of the laminate layer.
12. The method of claim 11 , wherein fabricating the semiconductor device package further comprises forming a plurality of through-mold vias (TMVs) within the overmold layer to one or more sides of the logic circuit-TSV layer.