Method for manufacturing solar cell having selective emitter and solar cell manufactured thereby
The present invention relates to a method for manufacturing a solar cell comprising a selective emitter, the method comprising the steps of: forming an electrode pattern and an alignment mark by performing a first impurity doping locally on one surface of a substrate; and performing a second impurity doping on the entire surface of the first doped substrate, wherein, as a result of the first and second doping, the alignment mark is formed on a first emitter or a second emitter, and the electrode pattern is formed on the second emitter. When manufacturing the selective emitter, the alignment mark is formed by doping processes. The use of the alignment mark may increase the matching of the electrode pattern formed in the selective emitter and the resulting electrode line. Further, a solar cell having the selective emitter has excellent conversion efficiency and a high fill factor value.
1. A method for manufacturing a solar cell, the method comprising:
performing primary doping in which a primary dopant is doped locally on one surface of a substrate to form an electrode pattern portion and at least one alignment mark;
performing secondary doping in which a secondary dopant is doped over the primarily doped surface of the substrate such that the electrode pattern portion and the at least one alignment mark are heavily-doped regions that are doped with the primary dopant together with the secondary dopant;
performing aligned printing of a composition for solar cell electrodes on the electrode pattern portion using the at least one alignment mark; and
baking the printed composition to form a front electrode,
wherein:
the at least one alignment mark is formed as a second emitter portion by the primary doping and the secondary doping, and
the electrode pattern portion is formed as the second emitter portion by the primary doping and the secondary doping.
2. The method according to claim 1 , wherein the primary doping includes printing a doping paste on the substrate to implant the primary dopant from the doping paste into the substrate.
3. The method according to claim 2 , further comprising:
annealing at about 250° C. to about 350° C. for about 1 minute to about 10 minutes after the primary doping.
4. The method according to claim 1 , wherein the secondary doping includes gas doping in a furnace at about 800° C. to about 850° C. to implant the secondary dopant into the substrate.
5. The method according to claim 1 , wherein the primary doping is performed such that the alignment mark is separated from the electrode pattern portion, and the electrode pattern portion and the alignment mark are formed as the second emitter portion by the primary doping and the secondary doping.
6. The method according to claim 1 , wherein the primary doping includes forming 1 to 6 alignment marks.
7. The method according to claim 6 , wherein:
the primary doping includes forming 2, 4, or 6 alignment marks, and
the alignment marks are arranged symmetrically.
8. The method according to claim 1 , wherein the at least one alignment mark has a regular or irregular shape and a diameter of about 0.2 mm to about 2 mm.
9. The method according to claim 1 , wherein the substrate is a p-type or n-type substrate.
10. The method according to claim 9 , wherein:
the primary dopant and the secondary dopant each independently include a group V element when the substrate is a p-type substrate, and
the primary dopant and the secondary dopant each independently include a group III element when the substrate is an n-type substrate.
11. A solar cell manufactured by the method according to claim 1 .
12. A method for manufacturing a solar cell, the method comprising:
performing primary doping in which a primary dopant is doped locally on one surface of a substrate to form an electrode pattern portion and 1 to 6 alignment marks; and
performing secondary doping in which a secondary dopant is doped over the primarily doped surface of the substrate such that the electrode pattern portion and the 1 to 6 alignment marks are heavily-doped regions that are doped with the primary dopant together with the secondary dopant,
wherein:
the 1 to 6 alignment marks are formed as a second emitter portion by the primary doping and the secondary doping, and
the electrode pattern portion is formed as the second emitter portion by the primary doping and the secondary doping.
13. The method according to claim 12 , wherein:
the primary doping includes forming 2, 4, or 6 alignment marks, and
the alignment marks are arranged symmetrically.
14. A solar cell manufactured by the method of claim 12 .