Pretreatment of transparent conductive oxide (TCO) thin films for improved electrical contact
View Patent ↗Certain embodiments relate to optical devices and methods of fabricating optical devices that pre-treat a sub-layer to enable selective removal of the pre-treated sub-layer and overlying layers. Other embodiments pertain to methods of fabricating an optical device that apply a sacrificial material layer.
1. A method of fabricating an optical device, the method comprising:
i) applying a sacrificial material layer only to a portion of the area of one or more sub-layers of the optical device;
ii) depositing one or more material layers of the optical device on the sacrificial material layer and the one or more sub-layers of the optical device; and
iii) applying a laser to the portion to ablate the optical device to remove the sacrificial material layer and any overlying layers.
2. The method of claim 1 , wherein the optical device is an electrochromic device.
3. The method of claim 2 , wherein the one or more sub-layers comprises TiO 2 .
4. The method of claim 2 , wherein the one or more sub-layers are on top of and directly adjacent to, a lower conductor layer of the electrochromic device.
5. The method of claim 4 , wherein the lower conductor layer comprises SnO 2 .
6. The method of claim 4 , wherein the lower conductor layer is substantially intact after iii).
7. The method of claim 4 , further comprising fabricating a bus bar on the lower conductor layer exposed in iii).
8. The method of claim 1 , wherein the one or more sub-layers comprise a metal oxide, a metal nitride, a metal carbide, a metal oxynitride, or a metal oxycarbide.
9. The method of claim 1 , wherein the one or more sub-layers comprises a metal oxide selected from the group consisting of aluminum oxide, titanium oxide, TiO 2 , tantalum oxide, cerium oxide, zinc oxide, tin oxide, silicon aluminum oxide, tungsten oxide, nickel tungsten oxide, and oxidized indium tin oxide.
10. The method of claim 1 , wherein the one or more sub-layers comprises a metal nitride selected from the group consisting of titanium nitride, aluminum nitride, silicon nitride, tantalum nitride, and tungsten nitride.
11. The method of claim 1 , wherein the one or more sub-layers comprises a metal carbide selected from the group consisting of titanium carbide, aluminum carbide, silicon carbide, tantalum carbide, and tungsten carbide.
12. The method of claim 2 , wherein the electrochromic device comprises a WO 3 electrochromic layer and a nickel-based counter electrode layer.
13. The method of claim 12 , wherein the nickel-based counter electrode layer comprises NiWO or NiTaO.