Oxide superconductor and method for manufacturing same
View Patent ↗An oxide superconductor includes: a substrate made of a metal; an insulating intermediate layer provided on the substrate; an oxide superconducting layer provided on the intermediate layer; a metal stabilizing layer provided on the oxide superconducting layer; and a plurality of dividing grooves which divide the metal stabilizing layer and the oxide superconducting layer along a longitudinal direction of the substrate, reach the inside of the intermediate layer through the oxide superconducting layer from the metal stabilizing layer, and do not reach the substrate. The metal stabilizing layer and the oxide superconducting layer are divided to form a plurality of filament conductors by the plurality of dividing grooves, and in each dividing groove of the plurality of dividing grooves, a width of a groove opening portion of the dividing groove is equal to or greater than a width of a groove bottom portion of the dividing groove.
1. An oxide superconductor, comprising:
a substrate made of a metal;
an insulating intermediate layer provided on the substrate;
an oxide superconducting layer provided on the intermediate layer;
a metal stabilizing layer provided on the oxide superconducting layer; and
a plurality of dividing grooves which divide the metal stabilizing layer and the oxide superconducting layer along a longitudinal direction of the substrate, the dividing grooves reaching an inside of the intermediate layer through the oxide superconducting layer from the metal stabilizing layer, the dividing grooves not reaching the substrate,
wherein the metal stabilizing layer and the oxide superconducting layer are divided to form a plurality of filament conductors by the plurality of dividing grooves,
wherein in each dividing groove of the plurality of dividing grooves, a width of a groove opening portion of the dividing groove is equal to or greater than a width of a groove bottom portion of the dividing groove,
wherein the intermediate layer includes a textured layer having a high crystal orientation and a cap layer formed on the textured layer,
wherein the groove bottom portion is formed to be positioned inside the cap layer, and
wherein the dividing groove is formed to expose a portion of the cap layer from the groove bottom portion.
2. The oxide superconductor according to claim 1 ,
wherein the dividing groove is formed by laser irradiation so that a groove wall portion of the dividing groove is covered with an insulating coating layer formed of constituent elements of the intermediate layer and the oxide superconducting layer, and the coating layer and the groove bottom portion have insulating properties.
3. The oxide superconductor according to claim 1 ,
wherein a groove width of the groove bottom portion is 5 to 100 μm.
4. The oxide superconductor according to claim 1 ,
wherein, in the plurality of filament conductors, a resistance between the filament conductors which are adjacent to each other with the dividing groove interposed therebetween is 1 MΩ cm or more.