IP Library Granted Patent US 10,385,217
Granted Patent B2
US 10,385,217 · App. 14/899,401 · Granted Aug 20, 2019

Formulations comprising hydridosilanes and hydridosilane oligomers, their process of manufacture and their use

Inventors: Stephan Traut (Loerrach Bromba, DE); Matthias Patz (Bottrop, DE); Stephan Wieber (Karlsruhe, DE); Paul Henrich Wöbkenberg (Hoelingen, DE); Joachim Erz (Schwoerstadt, DE); Jutta Hessing (Dorsten, DE)
Assignee: Evonik Degussa GmbH
C09D1/00C09D183/16C23C18/122C23C18/1212H01L31/1804H01L31/1864C08G77/045C08G77/60Y02E10/547Y02P70/521
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,385,217
App. No.
14/899,401
Granted
Aug 20, 2019
Kind
B2
Abstract

The present invention relates to formulations comprising at least one hydridosilane of the generic formula Si n H 2n+2 with n=7-10 and at least one hydridosilane oligomer, to processes for preparation thereof and to the use thereof.

Claims (27)

1. A formulation, comprising:

at least one hydridosilane, and

at least one hydridosilane oligomer, wherein the at least one hydridosilane has a generic formula Si n H 2n+2 with n ranging from 7-10,

wherein a proportion of the at least one hydridosilane is 0.1 to 60% by weight and a proportion of the at least one hydridosilane oligomer is from 40 to 99.9% by weight, each based on the total mass of said at least one hydridosilane and said at least one hydridosilane oligomer,

wherein the at least one hydridosilane oligomer has a weight-average molecular weight of 200 g/mol to 10 000 g/mol.

2. The formulation according to claim 1 , wherein the at least one hydridosilane is an octasilane isomer or a nonasilane isomer.

3. The formulation according to claim 1 , wherein the at least one hydridosilane is a branched hydridosilane.

4. The formulation according to claim 1 , wherein the at least one hydridosilane oligomer is obtained by a process comprising oligomerizing noncyclic hydridosilanes.

5. The formulation according to claim 4 , wherein the at least one hydridosilane oligomer is obtained by a process comprising converting thermally a composition comprising a noncyclic hydridosilane comprising not more than 20 silicon atoms, in the absence of a catalyst at a temperature of less than 235° C.

6. The formulation according to claim 1 , wherein the at least one hydridosilane oligomer comprises carbon.

7. The formulation according to claim 1 , wherein the at least one hydridosilane oligomer is doped.

8. The formulation according to claim 1 , wherein a proportion of the at least one hydridosilane is in a range of 1% to 40% by weight based on the total mass of the formulation.

9. The formulation according to claim 1 , wherein a proportion of the at least one hydridosilane oligomer is in a range of 1% to 60% by weight based on the total mass of the formulation.

10. The formulation according to claim 1 , wherein the formulation comprises a solvent.

11. The formulation according to claim 10 , wherein a proportion of the solvent is in a range of 25% to 95% by weight based on the total mass of the formulation.

12. The formulation according to claim 10 , wherein the formulation comprises: 1-30% by weight of at least one hydridosilane, 10-40% by weight of at least one hydridosilane oligomer and 50-85% by weight of solvent, based on the total mass of the formulation.

13. A process for preparing a formulation according to claim 1 , the process comprising:

mixing the at least one hydridosilane with the at least one hydridosilane oligomer and optionally a solvent.

14. A method for producing layers comprising silicon, the method comprising:

applying the formulation according to claim 1 to a substrate.

15. A method for producing electronic or optoelectronic layers, the method comprising:

applying the formulation according to claim 1 to a substrate.

16. A method for producing electronic or optoelectronic components, the method comprising:

applying the formulation according to claim 1 to a substrate.

17. The formulation according to claim 1 , further comprising a solvent in an amount of 0.1 to 99 wt. %, based on a total mass of said formulation.

18. The formulation according to claim 1 , further comprising a solvent in an amount of 25 to 99 wt. %, based on a total mass of said formulation.

19. The formulation according to claim 1 , further comprising a solvent in an amount of 60 to 95 wt. %, based on a total mass of said formulation.

Assignments (2)
CHANGE OF NAME Recorded Nov 18, 2019
From: EVONIK DEGUSSA GMBH
To: EVONIK OPERATIONS GMBH
Reel/Frame 051045/0872 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 21, 2016
From: TRAUT, STEPHAN; PATZ, MATTHIAS; WIEBER, STEPHAN; WOEBKENBERG, PAUL HENRICH; ERZ, JOACHIM; HESSING, JUTTA
To: EVONIK DEGUSSA GMBH
Reel/Frame 037540/0602 →
Priority Claims (1)
DE 10 2013 010 101 · Jun 18, 2013 · national
Continuity (1)
Related Publication 20160145440A1 · May 26, 2016