Solar cell manufacturing method
A method for manufacturing solar cell includes the following. A solution containing aluminum elements is misted. The misted solution is sprayed onto the main surface of a p-type silicon substrate in the atmosphere, to thereby form an aluminum oxide film. Then, a solar cell is produced using the p-type silicon substrate including the aluminum oxide film formed thereon.
1. A method for manufacturing solar cell, comprising:
(A) preparing a silicon substrate of p-type conductivity;
(B) forming an aluminum oxide passivation film on a main surface of said silicon substrate by spraying a misted solution containing aluminum elements onto said main surface of said silicon substrate at atmospheric pressure while supplying ozone to said silicon substrate; and
(C) producing a solar cell using said silicon substrate including said passivation film formed thereon,
wherein said misted solution is obtained by applying ultrasonic waves to a solution containing aluminum elements.