Manufacturing method for semiconductor substrate
A technique disclosed herein relates to a manufacturing method for a semiconductor substrate having the bonded interface with high bonding strength without forming an oxide layer at the bonded interface also for the substrate having surface that is hardly planarized. The manufacturing method for the semiconductor substrate may include an amorphous layer formation process in which a first amorphous layer is formed by modifying a surface of a support substrate and a second amorphous layer is formed by modifying a surface of a single-crystalline layer of a semiconductor. The manufacturing method may include a contact process in which the first amorphous layer and the second amorphous layer are contacted with each other. The manufacturing method may include a heat treatment process in which the support substrate and single-crystalline layer are heat-treated with the first amorphous layer and the second amorphous layer being in contact with each other.
1. A manufacturing method for a semiconductor substrate, the method comprising:
mechanically polishing a surface of a support substrate to planarize the surface,
forming a first amorphous layer by destroying crystalline structures of the planarized surface of the support substrate and a second amorphous layer by destroying a crystalline structures of a surface of a single-crystalline layer of a semiconductor;
bringing the first amorphous layer and second amorphous layer into contact with each other; and
conducting a heat treatment to the support substrate and single-crystalline layer with while the first amorphous layer and the second amorphous layer being in contact with each other,
wherein a thickness of the first amorphous layer and a thickness of the second
amorphous layer is made larger as surface roughness of the support substrate and surface roughness of the single-crystalline layer becomes greater to increase fluidity of the first amorphous layer and the second amorphous layer to fill spaces formed between the first amorphous layer and the second amorphous layer.
2. The manufacturing method for a semiconductor substrate according to claim 1 , wherein
the single-crystalline layer is formed from single-crystalline SiC, and
the support substrate is formed from polycrystalline SiC.
3. The manufacturing method for a semiconductor substrate according to claim 2 , wherein the first amorphous layer and the second amorphous layer contain Si and C.
4. The manufacturing method for a semiconductor substrate according to claim 1 , wherein the forming of the first amorphous layer and the second amorphous layer includes irradiating atomic-level particles in a vacuum, and
the bringing of the first amorphous layer and the second amorphous layer into contact is carried out subsequent to the forming of the first amorphous layer and the second amorphous layer.
5. A manufacturing method for a semiconductor substrate, the method comprising:
mechanically polishing a surface of a support substrate to planarize the surface,
determining a thickness of a first amorphous layer and a thickness of a second amorphous layer depending on surface roughness of the support substrate and surface roughness of a single-crystalline layer of a semiconductor to increase fluidity of the first amorphous layer and the second amorphous layer to fill spaces formed between the first amorphous layer and the second amorphous layer;
forming the first amorphous layer having the determined thickness by destroying a crystalline structures of the planarized surface of the support substrate and the second amorphous layer having the determined thickness by destroying a crystalline structures of a surface of the single-crystalline layer of the semiconductor;
bringing the first amorphous layer and second amorphous layer into contact with each other; and
conducting a heat treatment to the support substrate and single-crystalline layer while the first amorphous layer and the second amorphous layer being in contact with each other.
6. The manufacturing method for a semiconductor substrate according to claim 5 , wherein
the single-crystalline layer is formed from single-crystalline SiC, and
the support substrate is formed from polycrystalline SiC.
7. The manufacturing method for a semiconductor substrate according to claim 6 , wherein the first amorphous layer and the second amorphous layer contain Si and C.
8. The manufacturing method for a semiconductor substrate according to claim 5 , wherein the forming of the first amorphous layer and the second amorphous layer includes irradiating atomic-level particles in a vacuum, and
the bringing of the first amorphous layer and the second amorphous layer into contact is carried out subsequent to the forming of the first amorphous layer and the second amorphous layer.
9. A manufacturing method for a semiconductor substrate, the method comprising:
mechanically polishing a surface of a support substrate to planarize the surface,
determining that: a thickness of a first amorphous layer is in a range of 1 to 20 times greater than arithmetic average roughness of the surface of the support substrate; and a thickness of a second amorphous layer is in a range of 1 to 20 times greater than arithmetic average roughness of the surface of a single-crystalline layer of a semiconductor to increase fluidity of the first amorphous layer and the second amorphous layer to fill spaces formed between the first amorphous layer and the second amorphous layer;
forming the first amorphous layer having the determined thickness by destroying a crystalline structures of the planarized surface of the support substrate; and the second amorphous layer having the determined thickness by destroying a crystalline structures of a surface of the single-crystalline layer of the semiconductor;
bringing the first amorphous layer and second amorphous layer into contact with each other; and
conducting a heat treatment to the support substrate and single-crystalline layer while the first amorphous layer and the second amorphous layer being in contact with each other.
10. The manufacturing method for a semiconductor substrate according to claim 9 , wherein
the single-crystalline layer is formed from single-crystalline SiC, and
the support substrate is formed from polycrystalline SiC.
11. The manufacturing method for a semiconductor substrate according to claim 10 , wherein the first amorphous layer and the second amorphous layer contain Si and C.
12. The manufacturing method for a semiconductor substrate according to claim 9 , wherein the forming of the first amorphous layer and the second amorphous layer includes irradiating atomic-level particles in a vacuum, and
the bringing of the first amorphous layer and the second amorphous layer into contact is carried out subsequent to the forming of the first amorphous layer and the second amorphous layer.
13. A manufacturing method for a semiconductor substrate, the method comprising:
mechanically polishing a surface of a support substrate to planarize the surface,
forming a first amorphous layer by destroying a crystalline structures of the planarized surface of the support substrate and a second amorphous layer by destroying a crystalline structures of a surface of a single-crystalline layer of a semiconductor to increase fluidity of the first amorphous layer and the second amorphous layer to fill spaces formed between the first amorphous layer and the second amorphous layer;
bringing the first amorphous layer and second amorphous layer into contact with each other; and
conducting a heat treatment to the support substrate and single-crystalline layer while the first amorphous layer and the second amorphous layer being in contact with each other,
wherein a thickness of the first amorphous layer is within a range of 1 to 2 times greater than a Peak to Valley value indicating a roughness of the surface of the support substrate, and
a thickness of the second amorphous layer is within a range of 1 to 2 times greater than a Peak to Valley value indicating a roughness of the surface of the single-crystalline layer.
14. The manufacturing method for a semiconductor substrate according to claim 13 , wherein
the single-crystalline layer is formed from single-crystalline SiC, and
the support substrate is formed from polycrystalline SiC.
15. The manufacturing method for a semiconductor substrate according to claim 14 , wherein the first amorphous layer and the second amorphous layer contain Si and C.
16. The manufacturing method for a semiconductor substrate according to claim 13 , wherein the forming of the first amorphous layer and the second amorphous layer includes irradiating atomic-level particles in a vacuum, and
the bringing of the first amorphous layer and the second amorphous layer into contact is carried out subsequent to the forming of the first amorphous layer and the second amorphous layer.