Dicing a wafer of light emitting devices
Some embodiments include a III-nitride light emitting device with a light emitting layer disposed between an n-type region and a p-type region. A glass layer is connected to the III-nitride light emitting device. A wavelength converting layer is disposed between the III-nitride light emitting device and the glass layer. The glass layer is narrower than the III-nitride light emitting device.
1. A method of dicing a wafer, the method comprising:
providing a glass layer;
providing a light emitting device layer comprising light emitting devices and a dielectric material between the light emitting devices;
providing a wavelength converting layer between the glass layer and the light emitting device layer, the wavelength converting layer comprising particles;
sawing through the glass layer and the wavelength converting layer with a first metal-bonded diamond grit blade such that an abrasion level of the first metal bonded diamond grit blade is maintained by the particles in the wavelength converting layer; and
sawing through the dielectric material between the light emitting devices in the light emitting device layer with a second metal-bonded diamond grit blade, the first metal-bonded diamond grit blade being wider than the second metal-bonded diamond grit blade.
2. The method of claim 1 further comprising:
depositing a III-nitride light emitting layer between an n-type region and a p-type region of each light emitting device and wherein the dielectric material comprise silica particles and the wavelength converting layer comprises phosphor particles.
3. The method of claim 1 wherein providing the glass layer comprises providing the glass layer that is thicker than the light emitting device layer.
4. The method of claim 1 wherein the wavelength converting layer comprises at least 50% phosphor particles by volume and the phosphor particles are at least 10 μm in diameter.
5. The method of claim 4 wherein: the dielectric material comprises at least 50% silica particles by volume and the silica particles are at least 10 μm in diameter and further comprising:
maintaining the abrasion level of the metal bonded diamond grit blade by at least the silica particles.
6. A method of dicing a wafer comprising a glass layer, a light emitting device layer including light emitting devices and a dielectric material between the light emitting devices, the method comprising:
forming a wavelength converting layer between the glass layer and the light emitting device layer, the wavelength converting layer comprises at least 50% phosphor particles by volume and the phosphor particles are at least 10 μm in diameter;
sawing through the glass layer and the wavelength converting layer with a first metal-bonded diamond grit blade; and
creating, by the at least 50% phosphor particles by volume in the wavelength converting layer, a self-dressing effect on the metal-bonded diamond grit blade, to maintain an abrasion level.
7. The method of claim 6 , further comprising:
sawing through the dielectric material between the light emitting devices in the light emitting device layer with a second metal-bonded diamond grit blade, the first metal-bonded diamond grit blade being wider than the second metal-bonded diamond grit blade.