Electro-optical device, electronic apparatus, and method for manufacturing electro-optical device
An electro-optical device includes an element substrate main body, a first capacitance electrode that is arranged above the element substrate main body, and has a first metal film and a second metal film which is stacked onto the first metal film, a first protective insulating film that is arranged so as to cover a side wall of the first metal film, and expose at least a portion of a side wall of the second metal film, a dielectric film that is arranged throughout the side wall of the second metal film which is exposed from the first protective insulating film, and over the second metal film, and a second capacitance electrode that is arranged throughout the dielectric film on the second metal film, and over the dielectric film which is arranged in the side wall of the second metal film exposed from the first protective insulating film.
1. An electro-optical device comprising:
a substrate;
a lower capacitance electrode that is arranged above the substrate, and has a first metal film and a second metal film which is stacked onto the first metal film;
a first protective insulating film that is arranged so as to cover a side wall of the first metal film, and expose at least a portion of a side wall of the second metal film;
a dielectric film that is arranged throughout the side wall of the second metal film which is exposed from the first protective insulating film, and over the second metal film; and
an upper capacitance electrode that is arranged throughout the dielectric film on the second metal film, and over the dielectric film which is arranged in the side wall of the second metal film exposed from the first protective insulating film.
2. The electro-optical device according to claim 1 ,
wherein a direction along the substrate is a first direction, and
an angle which is made by the first direction and the side wall of the second metal film, is greater than an angle which is made by the first direction and the side wall of the first metal film.
3. The electro-optical device according to claim 1 ,
wherein a film thickness of the second metal film is the same as a film thickness of the first metal film, or is greater than the film thickness of the first metal film.
4. The electro-optical device according to claim 1 , further comprising:
a second protective insulating film that is positioned between the lower capacitance electrode and the dielectric film, and covers the lower capacitance electrode of a portion which does not overlap with the upper capacitance electrode in a planar view.
5. An electronic apparatus comprising:
the electro-optical device according to claim 1 .
6. An electronic apparatus comprising:
the electro-optical device according to claim 2 .
7. An electronic apparatus comprising:
the electro-optical device according to claim 3 .
8. An electronic apparatus comprising:
the electro-optical device according to claim 4 .