IP Library Granted Patent US 10,546,963
Granted Patent B2
US 10,546,963 · App. 14/926,916 · Granted Jan 28, 2020

Method and system for germanium-on-silicon photodetectors without germanium layer contacts

Inventors: Kam-Yan Hon (Oceanside, CA); Gianlorenzo Masini (Carlsbad, CA); Subal Sahni (La Jolla, CA)
Assignee: Luxtera, Inc.
H01L31/022408
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Quick Facts
Patent No.
US 10,546,963
App. No.
14/926,916
Granted
Jan 28, 2020
Kind
B2
Abstract

Methods and systems for germanium-on-silicon photodetectors without germanium layer contacts are disclosed and may include, in a semiconductor die having a photodetector, where the photodetector includes an n-type silicon layer, a germanium layer, a p-type silicon layer, and a metal contact on each of the n-type silicon layer and the p-type silicon layer: receiving an optical signal, absorbing the optical signal in the germanium layer, generating an electrical signal from the absorbed optical signal, and communicating the electrical signal out of the photodetector via the n-type silicon layer and the p-type silicon layer. The photodetector may include a horizontal or vertical junction double heterostructure where the germanium layer is above the n-type and p-type silicon layers. An intrinsically-doped silicon layer may be below the germanium layer between the n-type silicon layer and the p-type silicon layer. A top portion of the germanium layer may be p-doped.

Claims (35)

1. A method for optical communication, the method comprising:

in a semiconductor die having a photodetector, the photodetector comprising an n-type silicon layer, a germanium layer, a p-type silicon layer, and a metal contact on each of the n-type silicon layer and the p-type silicon layer, wherein a top surface of the germanium layer is above top surfaces of both the n-type silicon layer and the p-type silicon layer and a bottom surface of the germanium layer is below the top surfaces of both the n-type silicon layer and the p-type silicon layer, and wherein contacts to the photodetector are on opposite sides of the germanium layer with no contacts on a top surface of the germanium layer:

receiving an optical signal;

absorbing the optical signal in the germanium layer;

generating an electrical signal from the absorbed optical signal; and

communicating the electrical signal out of the photodetector via the n-type silicon layer and the p-type silicon layer.

2. The method according to claim 1 , wherein the photodetector comprises a horizontal junction double heterostructure.

3. The method according to claim 1 , wherein an intrinsically-doped silicon layer is below the germanium layer between the n-type silicon layer and the p-type silicon layer.

4. The method according to claim 1 , wherein a portion of the germanium layer nearest the p-doped silicon layer is p-doped.

5. The method according to claim 1 , wherein the photodetector comprises a vertical junction double heterostructure where the germanium layer is above a lower-doped n-type silicon layer.

6. The method according to claim 5 , wherein the n-type silicon layer and the p-type silicon layers are on opposite sides of the lower-doped silicon layer below the germanium layer where the p-type silicon layer and the lower-doped n-type silicon layer are in contact with the germanium layer while the n-type silicon layer is not.

7. The method according to claim 5 , wherein a top portion of the germanium layer is doped p-type.

8. The method according to claim 1 , wherein the photodetector comprises a surface-illuminated double heterostructure photodetector.

9. The method according to claim 8 , wherein the n-type silicon layer and the p-type silicon layer in the surface-illuminated double heterostructure photodetector comprise interdigitated fingers.

10. The method according to claim 8 , wherein the n-type silicon layer and the p-type silicon layer in the surface-illuminated double heterostructure photodetector comprise ring-shaped structures at an outer edge of the surface-illuminated double heterostructure photodetector.

11. A system for communication, the system comprising:

a semiconductor die having a photodetector, the photodetector comprising an n-type silicon layer, a germanium layer, a p-type silicon layer, and a metal contact on each of the n-type silicon layer and the p-type silicon layer, wherein a top surface of the germanium layer is above top surfaces of both the n-type silicon layer and the p-type silicon layer and a bottom surface of the germanium layer is below the top surfaces of both the n-type silicon layer and the p-type silicon layer, and wherein contacts to the photodetector are on opposite sides of the germanium layer with no contacts on a top surface of the germanium layer, the photodetector being operable to:

receive an optical signal;

absorb the optical signal in the germanium layer;

generate an electrical signal from the absorbed optical signal; and

communicate the electrical signal out of the photodetector via the n-type silicon layer and the p-type silicon layer.

12. The system according to claim 11 , wherein the photodetector comprises a horizontal junction double heterostructure.

13. The system according to claim 11 , wherein an intrinsically-doped silicon layer is below the germanium layer between the n-type silicon layer and the p-type silicon layer.

14. The system according to claim 11 , wherein a portion of the germanium layer nearest the p-doped silicon layer is p-doped.

15. The system according to claim 11 , wherein the photodetector comprises a vertical junction double heterostructure where the germanium layer is above a lower-doped n-type silicon layer.

16. The system according to claim 15 , wherein the n-type silicon layer and the p-type silicon layers are on opposite sides of the lower-doped silicon layer below the germanium layer where the p-type silicon layer and the lower-doped n-type silicon layer are in contact with the germanium layer while the n-type silicon layer is not.

17. The system according to claim 15 , wherein a top portion of the germanium layer is doped p-type.

18. The system according to claim 11 , wherein the photodetector comprises a surface-illuminated double heterostructure photodetector with the n-type silicon layer and the p-type silicon layer in the surface-illuminated double heterostructure photodetector comprising interdigitated fingers.

19. The system according to claim 18 , wherein the photodetector comprises a surface-illuminated double heterostructure photodetector with the n-type silicon layer and the p-type silicon layer in the surface-illuminated double heterostructure photodetector comprising ring-shaped structures at an outer edge of the surface-illuminated double heterostructure photodetector.

20. A system for communication, the system comprising:

a semiconductor die having a double heterostructure photodetector, the double heterostructure photodetector comprising an n-type silicon layer, a germanium layer with p-type doping in a portion of the germanium layer, a p-type silicon layer, and a metal contact on each of the n-type silicon layer and the p-type silicon layer, wherein a top surface of the germanium layer is above top surfaces of both the n-type silicon layer and the p-type silicon layer and a bottom surface of the germanium layer is below the top surfaces of both the n-type silicon layer and the p-type silicon layer, and wherein contacts to the photodetector are on opposite sides of the germanium layer with no contacts on a top surface of the germanium layer, the double heterostructure photodetector being operable to:

receive an optical signal;

absorb the optical signal in the germanium layer;

generate an electrical signal from the absorbed optical signal; and

communicate the electrical signal out of the photodetector via the n-type silicon layer and the p-type silicon layer.

Assignments (7)
CORRECTIVE ASSIGNMENT TO CORRECT THE THE ASSIGNOR'S NAME PREVIOUSLY RECORDED AT REEL: 058979 FRAME: 0027. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Mar 24, 2022
From: LUXTERA LLC
To: CISCO TECHNOLOGY, INC.
Reel/Frame 059496/0803 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 8, 2022
From: CISCO SYSTEMS, INC.
To: CISCO TECHNOLOGY, INC.
Reel/Frame 058979/0027 →
RELEASE OF SECURITY INTEREST Recorded Dec 24, 2020
From: SILICON VALLEY BANK
To: LUXTERA, LLC
Reel/Frame 054855/0838 →
CHANGE OF NAME Recorded Feb 6, 2020
From: LUXTERA, INC.
To: LUXTERA LLC
Reel/Frame 052019/0811 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 4, 2018
From: SAHNI, SUBAL; HON, KAM-YAN; MASINI, GIANLORENZO
To: LUXTERA, INC.
Reel/Frame 047668/0865 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 4, 2018
From: SAHNI, SUBAL; HON, KAM-YAN
To: LUXTERA, INC.
Reel/Frame 047672/0593 →
SECURITY INTEREST Recorded Mar 29, 2017
From: LUXTERA, INC.
To: SILICON VALLEY BANK
Reel/Frame 042109/0140 →
Cited By (1)
US 12,507,489