Flip-chip mounted semiconductor device
View Patent ↗Provided is a flip-chip mounted semiconductor device in which a crack is less likely to develop. Flip chip mounting is carried out under the condition that no oxide film exists on the scribe region so as to eliminate the interface between the oxide film that remains on the scribe region and the silicon substrate from which a crack may develop. As a result, the circuit board, the encapsulant, and the silicon substrate are stacked at an end portion of the semiconductor chip.
1. A flip-chip mounted semiconductor device, comprising:
a circuit board;
a semiconductor chip comprising a silicon substrate, the semiconductor chip being connected to the circuit board with an element surface of the semiconductor chip confronting the circuit board; and
an encapsulant filling a space between the semiconductor chip and the circuit board, the encapsulant not covering a side surface of the semiconductor chip, and the side surface being exposed, wherein an outer peripheral portion of the semiconductor chip comprises a scribe region that extends to a perimeter of the silicon substrate, and the encapsulant is in direct contact with the silicon substrate of the semiconductor chip at the scribe region.
2. A The flip-chip mounted semiconductor device according to claim 1 , wherein silicon of the silicon substrate is exposed from a region of the scribe region of the semiconductor chip, and the encapsulant and the silicon substrate are in direct contact with each other at the region.
3. The flip-chip mounted semiconductor device according to claim 2 , wherein the silicon is exposed in a depressed region and the encapsulant fills the depressed region.