Semiconductor device
View Patent ↗Provided is an integrated circuit having a LOCOS-drain type MOS transistor mounted thereon in which, even in the case of poor pattern formation, a withstand voltage is not lowered and a poor withstand voltage does not result. A drain oxide film thicker than a gate oxide film is formed on an active region on a drain side of the LOCOS-drain type MOS transistor, to thereby prevent the withstand voltage of the MOS transistor from being lowered even if the gate electrode reaches the active region on the drain side.
1. A semiconductor device including a MOS transistor, the MOS transistor comprising:
a gate oxide film formed on a surface of a channel region;
a LOCOS oxide film thicker than the gate oxide film and formed contiguous to the gate oxide film on a drain side;
a gate electrode formed on the gate oxide film and the LOCOS oxide film; and
a drain oxide film thicker than the gate oxide film and thinner than the LOCOS oxide film, the drain oxide film being separate from the LOCOS oxide film and being formed on a surface of an active region and extending from the LOCOS oxide film on a side opposite to the channel region,
wherein the LOCOS oxide film has a bird's beak region, and the drain oxide film is contiguous to the bird's beak region and covers most of the surface of the active region.
2. A semiconductor device according to claim 1 , wherein the drain oxide film has a withstand voltage higher than a withstand voltage of the drain.
3. A semiconductor device according to claim 1 , wherein the gate electrode overlaps the LOCOS oxide film by ½ or more of a length of the LOCOS oxide film in a channel direction.
4. A semiconductor device according to claim 1 , further comprising a drain region and a source region formed in a surface of a substrate in spaced apart relationship from one another at opposite ends of the channel region, the LOCOS oxide film being formed on the drain region.
5. A semiconductor device according to claim 4 , wherein the gate oxide film is formed on both the source region and the channel region.
6. A semiconductor device according to claim 1 , further comprising a drain region located beneath, and covered by, the LOCOS oxide film; and a diffusion layer adjacent to the drain region, the diffusion layer constituting the active region.