Semiconductor integrated circuit including power TSVS
View Patent ↗A semiconductor device including power TSVs for stably supplying a power source is described. A semiconductor device includes a chip power pad placed in a first region of a chip, power through silicon vias (TSVs) connected to the chip power pad and placed in the second region of each of the chips, and metal lines configured to couple the chip power pad and the power TSVs.
1. A semiconductor integrated circuit, comprising:
a plurality of chips which are stacked,
wherein each chip includes:
an active region including a plurality of reservoir capacitor regions and a plurality of dummy regions, wherein the reservoir capacitor regions and the dummy regions are alternately arranged in a first direction being parallel with a surface of the chip; and
a plurality of dummy lines disposed on each dummy region and extended along the first direction;
a pair of power source line groups arranged in the active region, wherein the reservoir capacitor regions and the dummy regions are arranged between the pair of power source line groups, and each of the power source line groups includes a VDD power source line and a VSS power source line; and
power through silicon vias (TSVs) formed in the active region, wherein each of the power TSVs is positioned between a dummy region and a reservoir capacitor region,
wherein the plurality of dummy lines of a selected dummy region are electrically coupled with the power TSVs which are arranged at sides of the selected dummy region.
2. The semiconductor integrated circuit according to claim 1 , further comprising:
power lines that are extended along a second direction being perpendicular to the first direction.
3. The semiconductor integrated circuit according to claim 2 , wherein the power lines are disposed on the reservoir capacitor regions to be connected to the power TSVs.
4. The semiconductor integrated circuit according to claim 3 , wherein a selected power line and another selected power line are electrically coupled using a selected dummy line.
5. The semiconductor integrated circuit according to claim 1 , wherein the plurality of dummy lines correspond to a first metal layer.
6. The semiconductor integrated circuit according to claim 5 , wherein the power lines correspond to a second metal layer which is formed over the first metal layer.
7. The semiconductor integrated circuit according to claim 1 , further comprising:
a pad region spaced from the active region; and
a plurality of chip power pads placed in the pad region.
8. The semiconductor integrated circuit according to claim 7 , wherein the chip power pads are electrically coupled with the power TSVs, respectively.