IP Library Granted Patent US 9,941,319
Granted Patent B2
US 9,941,319 · App. 14/936,657 · Granted Apr 10, 2018

Semiconductor and optoelectronic methods and devices

Inventors: Zvi Or-Bach (San Jose, CA); Deepak C. Sekar (San Jose, CA)
Assignee: Monolithic 3D Inc.
H01L27/14634H01L27/1469H01L27/14623H01L27/14629H01L27/14647H01L25/0756H01L33/382
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Quick Facts
Patent No.
US 9,941,319
App. No.
14/936,657
Granted
Apr 10, 2018
Kind
B2
Abstract

A method for processing a semiconductor wafer, the method including: providing a semiconductor wafer including an image sensor pixels layer including a plurality of image sensor pixels, the layer overlaying a wafer substrate; and then bonding the semiconductor wafer to a carrier wafer; and then cutting off a substantial portion of the wafer substrate, and then processing the substantial portion of the wafer substrate for reuse.

Claims (46)

1. An image sensor, comprising:

a mono-crystallized silicon layer comprising a plurality of image sensor pixels, said mono-crystallized silicon layer bonded to a carrier wafer,

wherein said mono-crystallized silicon layer bonded to said carrier wafer leaves a re-useable base wafer used to hold said mono-crystallized silicon layer;

an oxide overlaying said mono-crystallized silicon layer; and

a second mono-crystal layer overlaying said oxide,

wherein said second mono-crystal layer comprises a plurality of single crystal transistors aligned to said image sensor pixels,

wherein said plurality of single crystal transistors overlay said image sensor pixels, and wherein said second mono-crystal layer is less than 2 microns thick.

2. An image sensor wafer, comprising:

a mono-crystallized silicon layer comprising a plurality of image sensor pixels, said mono-crystallized silicon layer bonded to a carrier wafer,

wherein said mono-crystallized silicon layer bonded to said carrier wafer leaves a re-useable base wafer used to hold said mono-crystallized silicon layer; an oxide overlaying said mono-crystallized silicon layer; and a second mono-crystal layer overlaying said oxide, wherein said second mono-crystal layer comprises a plurality of single crystal transistors aligned to said image sensor pixels,

wherein said plurality of single crystal transistors overlay said image sensor pixels, and wherein said single crystal transistors form a plurality of pixel control circuits.

3. An image sensor wafer, comprising:

a mono-crystallized silicon layer comprising a plurality of image sensor pixels, said mono-crystallized silicon layer bonded to a carrier wafer,

wherein said mono-crystallized silicon layer bonded to said carrier wafer leaves a re-useable base wafer used to hold said mono-crystallized silicon layer; an oxide overlaying said mono-crystallized silicon layer; and

a second mono-crystal layer overlaying said oxide, wherein said second mono-crystal layer comprises a plurality of single crystal transistors aligned to said image sensor pixels, and wherein said plurality of single crystal transistors overlay said image sensor pixels.

4. An image sensor wafer according to claim 3 ,

wherein said second mono-crystal layer is less than 2 microns thick.

5. An image sensor wafer according to claim 3 ,

wherein said mono-crystallized silicon layer comprises two crystalline layers,

wherein said two crystalline layers comprise a first image sensor layer and a second image sensor layer.

6. An image sensor wafer according to claim 3 ,

wherein said mono-crystallized silicon layer comprises two crystalline layers,

wherein said two crystalline layers comprise a first transistors layer and a second transistors layer.

7. An image sensor wafer according to claim 3 ,

wherein said mono-crystallized silicon layer is less than 6 microns thick.

8. An image sensor wafer according to claim 3 ,

wherein said single crystal transistors form a plurality of pixel control circuits.

9. An image sensor wafer, comprising:

a mono-crystallized silicon layer comprising a plurality of image sensor pixels, said mono-crystallized silicon layer bonded to a carrier wafer;

wherein said carrier wafer comprises a mono-crystal layer comprising a plurality of single crystal transistors,

wherein said plurality of single crystal transistors are aligned to said image sensor pixels with less than 100 nm alignment error, and

wherein said plurality of single crystal transistors overlay said image sensor pixels.

10. An image sensor wafer according to claim 9 , further comprising:

an oxide layer between said mono-crystallized silicon layer and said carrier wafer.

11. An image sensor wafer according to claim 9 ,

wherein said mono-crystallized silicon layer is less than 2 microns thick.

12. An image sensor wafer according to claim 9 ,

wherein said image sensor pixels layer comprises two crystalline layers, and

wherein said two crystalline layers comprise a first image sensor layer and a second image sensor layer.

13. An image sensor wafer according to claim 9 ,

wherein said carrier wafer comprises two crystalline layers,

wherein said two crystalline layers comprise a first transistor layer and a second transistor layer.

14. An image sensor wafer according to claim 9 ,

wherein said image sensor pixels layer is less than 6 microns thick.

15. An image sensor wafer according to claim 9 ,

wherein said mono-crystallized silicon layer bonded to said carrier wafer leaves a re-useable base wafer used to hold said mono-crystallized silicon layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 23, 2016
From: OR-BACH, ZVI; SEKAR, DEEPAK
To: MONOLITHIC 3D INC.
Reel/Frame 038362/0835 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 22, 2015
From: OR-BACH, ZVI; SEKAR, DEEPAK
To: MONOLITHIC 3D INC.
Reel/Frame 037110/0852 →
Continuity (3)
Continuation In Part 13274161 · Oct 14, 2011
Continuation In Part 12904103 · Oct 13, 2010
Related Publication 20160064439A1 · Mar 3, 2016