Physical quantity sensor, method for manufacturing physical quantity sensor, electronic device, and moving body
View Patent ↗A physical quantity sensor includes a supporting substrate, an acceleration detecting element that is mounted on the supporting substrate, and a sealing substrate that is bonded to the supporting substrate, and seals the acceleration detecting element, in which a notch portion is formed in a portion of a bonded face to the supporting substrate, in the sealing substrate, and a filling material that is configured by a material which is different from a material configuring the sealing substrate, is arranged in the notch portion.
1. A method for manufacturing a physical quantity sensor device, the method comprising:
preparing a support substrate having a first recess and a first ledge;
bonding a sensor element on the first ledge of the support substrate so that the sensor element is spaced apart from a bottom of the first recess;
preparing a seal substrate having a second recess and a second ledge;
forming a groove in the second ledge of the seal substrate;
placing a filling material in the groove;
bonding the first ledge to the second ledge so as to form a bonded body, an inner space of the bonded body being enclosed by only the support substrate and the seal substrate, the filling material being enclosed within the groove by the first ledge; and
cutting the bonded body through the groove to form the physical quantity sensor device,
wherein, after cutting, the filling material is externally exposed along only a part of an outer sidewall of the seal substrate, and
the groove is laterally shifted from the inner space of the bonded body in a plan view.
2. The method according to claim 1 ,
wherein the filling material comprises a low melting point glass material.
3. The method according to claim 1 ,
wherein the seal substrate comprises a silicon material.
4. The method according to claim 2 ,
wherein the seal substrate comprises a silicon material.
5. The method according to claim 1 ,
wherein the support substrate comprises a glass material.
6. The method according to claim 2 ,
wherein the support substrate comprises a glass material.
7. The method according to claim 3 ,
wherein the support substrate comprises a glass material.
8. The method according to claim 4 ,
wherein the support substrate comprises a glass material.