Transparent conductive structure, device comprising the same, and the manufacturing method thereof
View Patent ↗An optical electrical device comprises a base and a transparent conductive structure on the base is disclosed. The base further comprises a light-emitting device and the transparent conductive structure comprises a transparent conductive oxide layer and a passivation layer on the transparent conductive oxide layer. The material of the transparent conductive oxide layer comprises transparent conductive metal oxide, such as ZnO. Furthermore, the transparent conductive metal oxide also comprises impurities, such as a carrier e.g. gallium.
1. A method of manufacturing a transparent conductive structure, comprising:
forming a transparent conductive layer by sequentially injecting a first precursor and a second precursor at a first temperature, the transparent conductive layer having a first resistivity;
providing a passivation layer directly connected to the transparent conductive layer; and
applying a thermal treatment to the transparent conductive layer and the passivation layer at a second temperature higher than the first temperature,
wherein the transparent conductive layer and the passivation layer collectively have a first transmittance before the thermal treatment and a second transmittance after the thermal treatment,
wherein the transparent conductive layer has a second resistivity higher than the first resistivity after the thermal treatment.
2. The method of claim 1 , wherein the first precursor and the second precursor comprise H 2 O, Diethylzinc (DEZ) or triethylgallium (TEG).
3. The method of claim 1 , further comprising a step of pausing for a time between injecting the first precursor and the second precursor.
4. The method of claim 1 , further comprising a step of injecting a purge gas after injecting the first precursor and the second precursor.
5. The method of claim 1 , further comprising a step of injecting a third precursor after injecting the first precursor.
6. The method of claim 5 , wherein the third precursor has an injection cycle fewer than that of the second precursor.
7. The method of claim 1 , wherein the second transmittance is higher than the first transmittance for a light with a wavelength between 400 nm and 500 nm or above 550 nm.
8. The method of claim 1 , wherein the second transmittance is larger than 97% in a blue light range when the transparent conductive layer is placed on a glass.
9. The method of claim 1 , wherein the second transmittance is larger than 95% in a red light range when the transparent conductive layer is placed on a glass.
10. The method of claim 1 , wherein the first transmittance has a first maximum value at a first wavelength, the second transmittance has a second maximum value at a second wavelength, the first wavelength and the second wavelength have a difference of less than 10 nm.
11. The method of claim 1 , wherein the transparent conductive layer comprises zinc oxide doped with a group IIIA element, a mole fraction of the group IIIA element is less than 10%.
12. The method of claim 1 , wherein the passivation layer comprises aluminum oxide or silicon oxide.
13. A method of manufacturing a light-emitting device, comprising:
providing a semiconductor structure;
forming a transparent conductive layer on the semiconductor structure by injecting a first precursor and a second precursor at a first temperature, the transparent conductive layer having a first resistivity;
providing a passivation layer directly connected to the transparent conductive layer; and
applying a thermal treatment at a second temperature higher than the first temperature,
wherein the transparent conductive layer and the passivation layer collectively have a first transmittance before the thermal treatment and a second transmittance after the thermal treatment,
wherein the transparent conductive layer has a second resistivity higher than or similar the first resistivity after the thermal treatment.
14. The method of claim 13 , wherein the first precursor and the second precursor comprise H 2 O, Diethylzinc (DEZ) or triethylgallium (TEG).
15. The method of claim 13 , wherein the second transmittance is higher than the first transmittance.
16. The method of claim 13 , wherein the first transmittance has a first maximum value at a first wavelength, the second transmittance has a second maximum value at a second wavelength, the first wavelength and the second wavelength have a difference of less than 10 nm.
17. The method of claim 13 , wherein the semiconductor structure comprises a first semiconductor layer, an active layer, and a second semiconductor layer.
18. The method of claim 13 , wherein the transparent conductive layer comprises zinc oxide doped with group IIIA element, a mole fraction of the group IIIA element is less than 10%.
19. The method of claim 13 , wherein the passivation layer comprises aluminum oxide or silicon oxide.
20. The method of claim 13 , further comprising a step of providing a conductive layer sandwiched by the transparent conductive layer and the semiconductive structure.