Compact and low loss Y-junction for submicron silicon waveguide
A compact, low-loss and wavelength insensitive Y-junction for submicron silicon waveguides. The design was performed using FDTD and particle swarm optimization (PSO). The device was fabricated in a 248 nm CMOS line. Measured average insertion loss is 0.28±0.02 dB across an 8-inch wafer. The device footprint is less than 1.2 μm×2 μm, orders of magnitude smaller than MMI and directional couplers.
1 - 8 . (canceled)
9 . A 1×2 power splitter for use in submicron silicon waveguides, comprising:
an input port configured to receive an optical signal having an input power;
a pair of output ports configured to provide substantially equal output signals; and
a tapered waveguide coupling said input port to said output ports comprising a plurality of widths.
10 . The 1×2 power splitter for use in submicron silicon waveguides of claim 9 , wherein said 1×2 power splitter has a minimum feature size of 200 nm.
11 . The 1×2 power splitter for use in submicron silicon waveguides of claim 9 , wherein said 1×2 power splitter is configured to be manufactured using a CMOS fabrication process.
12 . The 1×2 power splitter for use in submicron silicon waveguides of claim 11 , wherein said CMOS fabrication process is a process conducted using a 248 nm scanner.
13 . The 1×2 power splitter for use in submicron silicon waveguides of claim 11 , wherein said CMOS fabrication process is a process conducted using a 193 nm scanner.
14 . The 1×2 power splitter for use in submicron silicon waveguides of claim 9 , wherein said plurality of widths are selected to reduce excess loss.
15 . A method for making a 1×2 power splitter for use in submicron silicon waveguides, comprising the steps of:
configuring an input port to receive an optical signal having an input power;
configuring a pair of output ports to provide substantially equal output signals; and
coupling said input port and to said output ports using a tapered waveguide comprising a plurality of widths.
16 . The method of claim 15 , wherein said plurality of widths can be defined by a numerical algorithm.
17 . The method of claim 16 , wherein said numerical algorithm is a particle swarm optimization.
18 . The method of claim 16 , wherein said numerical algorithm is a genetic algorithm.