Optical closed loop microresonator and thyristor memory device
A semiconductor device that includes an optical resonator spaced from a waveguide structure to provide for evanescent-wave optical coupling therebetween. The optical resonator includes a closed loop waveguide defined by an epitaxial layer structure that includes at least one quantum well. The semiconductor device also includes circuitry configured to supply an electrical signal that flows within the epitaxial layer structure of the closed loop waveguide. The electrical signal affects charge density in at least quantum well of the closed loop waveguide and controls refractive index of the closed loop waveguide. In one embodiment, the electrical signal is a DC current signal that flows within a vertical thyristor structure of the closed loop waveguide to control refractive index of the closed loop waveguide such that resonance frequency of the closed loop waveguide corresponds to a characteristic wavelength of light.
1. A semiconductor device defined by an epitaxial layer structure deposited on a substrate, wherein the epitaxial layer structure includes:
an n-type layer structure;
a p-type modulation doped quantum well (QW) interface formed on the n-type layer structure;
an n-type modulation doped QW interface spaced above the p-type modulation doped QW interface by way of a spacer layer; and
a p-type layer structure formed on the n-type modulation doped QW interface, wherein the semiconductor device includes:
an optical resonator including a closed loop waveguide, wherein the closed loop waveguide includes:
a first electrode formed on the n-type layer structure;
a first ion implant formed into a mesa above the p-type modulation doped QW interface, and that contacts the p-type modulation doped QW interface;
a second ion implant formed below a first mesa of the p-type layer structure and above the n-type modulation doped QW interface, and that contacts the n-type modulation doped QW interface;
a second electrode in contact with the first ion implant, and that is electrically coupled to the p-type modulation doped QW interface by way of the first ion implant;
a third electrode in contact with the second ion implant, and that is electrically coupled to the n-type modulation doped QW interface by way of the second ion implant; and
a fourth electrode formed on the p-type layer structure; and
a waveguide structure spaced from the closed loop waveguide of the optical resonator to provide for evanescent-wave coupling therebetween, wherein the waveguide structure includes:
a third ion implant formed below a second mesa of the p-type layer structure and above the n-type modulation doped QW interface, and that contacts the n-type modulation doped QW interface;
a fifth electrode in contact with the third ion implant, and that is electrically coupled to the n-type modulation doped QW interface by way of the third ion implant; and
a sixth electrode formed on the p-type layer structure.
2. The semiconductor device of claim 1 , wherein:
at least one of the first, second, third, and fourth electrodes supply a first electrical signal that flows within the epitaxial layer structure of the closed loop waveguide for varying charge density in at least one of the p-type and n-type modulation doped QW interfaces of the closed loop waveguide, thereby controlling a refractive index of the closed loop waveguide such that a resonance frequency of the closed loop waveguide corresponds to a characteristic wavelength of light.
3. The semiconductor device of claim 1 , wherein:
the epitaxial layer structure of the closed loop waveguide defines a vertical thyristor structure including the p-type and n-type modulation doped QW interfaces.
4. The semiconductor device of claim 1 , wherein:
the fifth and sixth electrodes are configured to provide a second electrical signal that varies charge density in at least one of the p-type and n-type modulation doped QW interfaces of the waveguide structure for changing a refractive index of the waveguide structure and modulating the evanescent-wave coupling between the closed loop waveguide and the waveguide structure.
5. The semiconductor device of claim 1 , wherein a length of the closed loop waveguide corresponds to a characteristic wavelength of light.
6. The semiconductor device of claim 1 , wherein the closed loop waveguide is a rectangular waveguide with four straight sections coupled by ninety-degree bends.
7. The semiconductor device of claim 6 , wherein each ninety-degree bend includes an outside facet and a cut inside corner that extends parallel to the outside facet.
8. The semiconductor device of claim 6 , wherein the waveguide structure has a zig-zag path with five straight sections coupled by ninety-degree bends.
9. The semiconductor device of claim 1 , further comprising a plurality of distributed Bragg reflector (DBR) mirror layers formed on the substrate below a vertical thyristor structure of the closed loop waveguide.
10. The semiconductor device of claim 9 , further comprising a plurality of dielectric mirror layers formed on the substrate above the vertical thyristor structure of the closed loop waveguide.
11. The semiconductor device of claim 10 , wherein:
the second electrode is a top p-type metal layer, and is a first injector terminal of the vertical thyristor structure of the closed loop waveguide;
the third electrode is an n-type metal layer, and is a second injector terminal of the vertical thyristor structure of the closed loop waveguide;
the first electrode is a bottom n-type metal layer and is a cathode electrode of the vertical thyristor structure of the closed loop waveguide; and
the fourth electrode is a top p-type metal layer, and is an anode electrode of the vertical thyristor structure of the closed loop waveguide.
12. The semiconductor device of claim 1 , wherein the optical resonator is configured to operate as at least one of:
an optical modulator that modulates a continuous-wave optical signal supplied to an input of the waveguide structure in order to produce a modulated optical signal at an output of the waveguide structure;
a detector that produces an output signal corresponding to ON/OFF levels of an input optical signal supplied to the waveguide structure; and
a vertical cavity surface emitting laser (VCSEL) for producing light emission from an optical aperture.
13. The semiconductor device of claim 1 , wherein the optical resonator is configured to operate as an in-plane laser, wherein the in-plane laser produces an optical signal that is transferred to the waveguide structure and is emitted from the waveguide structure.
14. The semiconductor device of claim 1 , wherein the semiconductor device further comprises:
a fourth ion implant formed below the fourth electrode, and that encompasses the n-type modulation doped QW interface;
a fifth ion implant formed below the fourth ion implant, and that encompasses the p-type modulation doped QW interface;
a sixth ion implant formed below the sixth electrode, and that encompasses the n-type modulation doped QW interface;
a seventh ion implant formed below the sixth ion implant, and that encompasses the p-type modulation doped QW interface;
an eighth ion implant formed between the fourth and sixth ion implants, and that encompasses the n-type modulation doped QW interface; and
a ninth ion implant formed below the eighth ion implant, and that encompasses the p-type modulation doped QW interface.