Thin-film transistor and method of manufacturing the same
View Patent ↗According to one embodiment, a thin-film transistor and a method of manufacturing the thin-film transistor provided herein achieve enhanced reliability by preventing a disconnection in a gate insulating film at a position corresponding to an end surface of an oxide semiconductor layer. The oxide semiconductor layer includes a channel region, a source region, and a drain region. The channel region is placed between the source region and the drain region. The gate insulating film covers the oxide semiconductor layer in a range from at least a part of an upper surface to an end surface continuous with the upper surface of the oxide semiconductor layer. The oxide semiconductor layer is formed so as to have an oxygen concentration that becomes lower from a top side to a bottom side and the end surface is inclined so as to diverge from the top side to the bottom side.
1. A method of manufacturing a thin-film transistor comprising an oxide semiconductor layer including a channel region, a source region, and a drain region, the channel region being placed between the source region and the drain region; a covering layer being a gate insulating film that covers the oxide semiconductor layer in a range including an end surface of the oxide semiconductor layer; a gate electrode arranged at a position spaced from the channel region of the oxide semiconductor layer so as to face the channel region; a source electrode electrically connected to the source region of the oxide semiconductor layer; and a drain electrode electrically connected to the drain region of the oxide semiconductor layer, the method comprising:
forming an oxide semiconductor film in a manner such that the oxygen concentration becomes lower continuously from the top side to the bottom side in all of the channel region, the source region, and the drain region by depositing the oxide semiconductor film while changing an oxygen flow rate continuously, wherein
the oxide semiconductor film is etched with a given mask formed on the oxide semiconductor film to form the oxide semiconductor layer with the end surface inclined so as to diverge from the top side to the bottom side,
the covering layer is formed so as to cover the oxide semiconductor layer in the range including the end surface, and
contact holes are formed on the covering layer, and, through the contact holes, the source electrode is electrically connected to the source region and the drain electrode is electrically connected to the drain region.
2. The method of manufacturing the thin-film transistor according to claim 1 , wherein the oxide semiconductor layer is formed of an oxide containing at least one of indium, gallium, zinc, and tin.
3. The method of manufacturing the thin-film transistor according to claim 1 , wherein an etching rate changes in accordance with an oxygen concentration of the oxide semiconductor layer.