Integrated hybrid laser source compatible with a silicon technology platform, and fabrication process
View Patent ↗A photonic integrated circuit includes a first insulating region encapsulating at least one metallization level, a second insulating region at least partially encapsulating a gain medium of a laser source, and a stacked structure placed between the two insulating regions. The stacked structure includes a first polycrystalline or single-crystal silicon layer, a second polycrystalline or single-crystal silicon layer, an intermediate layer optically compatible with the wavelength of the laser source and selectively etchable relative to silicon and that separates the first layer from a first portion of the second layer, and the gain medium facing at least one portion of the first layer. The first layer, the intermediate layer, and the first portion of the second layer form an assembly containing a resonant cavity and a waveguide, which are optically coupled to the gain medium, and a second portion of the second layer containing at least one other photonic component.
1. A photonic integrated circuit comprising:
at least one metallization level;
a first insulating region encapsulating the at least one metallization level;
a gain medium of a laser source;
a second insulating region at least partially encapsulating the gain medium; and
a stacked structure placed between the first and second insulating regions and comprising
a first layer comprising polycrystalline or single-crystal silicon,
a second layer comprising polycrystalline or single-crystal silicon, and
an intermediate layer optically compatible with a wavelength of the laser source and selectively etchable relative to silicon and that separates the first layer from a first portion of the second layer, said gain medium facing at least one portion of the first layer,
the first layer, the intermediate layer and the first portion of the second layer defining an assembly comprising a resonant cavity and a waveguide, which are optically coupled to said gain medium, and
the second layer having a second portion comprising at least one other photonic component.
2. The photonic integrated circuit according to claim 1 , wherein the intermediate layer has an optical absorption coefficient lower than 50 cm −1 .
3. The photonic integrated circuit according to claim 1 , wherein the first layer and the second layer comprise single-crystal silicon, and the intermediate layer comprises an Si x Ge 1-x silicon-germanium alloy.
4. The photonic integrated circuit according to claim 3 , wherein x is between 0.6 and 0.8.
5. The photonic integrated circuit according to claim 3 , the intermediate layer has a thickness of between 10 nm and 40 nm.
6. The photonic integrated circuit according to claim 3 , wherein the laser source has a wavelength of 1310 nm, the silicon-germanium alloy is an Si 0.7 Ge 0.3 alloy and has a thickness of 10 nm.
7. The photonic integrated circuit according to claim 1 , wherein the second layer has a thickness of 300 nm and the first layer has a thickness of 200 nm.
8. The photonic integrated circuit according to claim 1 , wherein the resonant cavity comprises Bragg mirrors under the gain medium.
9. The photonic integrated circuit according to claim 1 , wherein the resonant cavity comprises Bragg mirrors exterior to the gain medium.
10. The photonic integrated circuit according to claim 1 , wherein the second insulating region extends between the gain medium and the first layer.
11. A photonic integrated circuit comprising:
at least one metallization level;
a first insulating region encapsulating the at least one metallization level;
a gain medium of a laser source;
a second insulating region at least partially encapsulating the gain medium; and
a stacked structure placed between the first and second insulating regions and comprising
a first layer comprising silicon,
a second layer comprising silicon, and
an intermediate layer that separates the first layer from a first portion of the second layer, said gain medium facing at least one portion of the first layer,
the first layer, the intermediate layer and the first portion of the second layer defining an assembly comprising a resonant cavity and a waveguide, which are optically coupled to said gain medium, and
the second layer having a second portion comprising at least one other photonic component.
12. The photonic integrated circuit according to claim 11 , wherein the first layer and the second layer comprise single-crystal silicon, and the intermediate layer comprises an Si x Ge 1-x silicon-germanium alloy.
13. The photonic integrated circuit according to claim 12 , wherein x is between 0.6 and 0.8.
14. The photonic integrated circuit according to claim 11 , wherein the resonant cavity comprises Bragg mirrors under the gain medium.
15. The photonic integrated circuit according to claim 11 , wherein the resonant cavity comprises Bragg mirrors exterior to the gain medium.
16. The photonic integrated circuit according to claim 11 , wherein the second insulating region extends between the gain medium and the first layer.
17. A process for fabricating a photonic integrated circuit, comprising:
forming, above a carrier, a stack comprising an initial layer of polycrystalline or single-crystal silicon and a second layer of polycrystalline or single-crystal silicon, the initial and second layers being mutually separated by a separating layer optically compatible with a wavelength of a laser source and selectively etchable relative to silicon;
forming, in the second layer, at least one portion of a waveguide and at least one other photonic component;
forming, facing the second layer, a first insulating region encapsulating at least one metallization level;
removing the carrier; and
forming the laser source comprising
forming in the stack a stacked structure comprising a first layer formed by a portion of the initial layer, the second layer and an intermediate layer formed by a portion of the separating layer and separating the first layer from a first portion of the second layer,
the first layer, the intermediate layer and the first portion of the second layer forming an assembly containing a resonant cavity and the waveguide, and
encapsulating at least a gain medium of the laser source, wherein the gain medium is optically coupled to the assembly, in a second insulating region located opposite the first insulating region relative to the stacked structure.
18. The process according to claim 17 , wherein producing the stack comprises epitaxial growth of a layer of an Si x Ge 1-x silicon-germanium alloy to form the separating layer on a single-crystal silicon film of a silicon-on-insulator substrate, the single-crystal silicon film forming the initial layer, and epitaxial growth of single-crystal silicon on the separating layer to form the second layer.
19. The process according to claim 17 , wherein producing at least one portion of a waveguide and at least one other photonic component comprises:
partial etching of the second layer in first locations of the second layer; and
in second locations of the second layer, etching through the second layer followed by etching of the separating layer, by partial etching of the initial layer and by filling of etched orifices with an insulating material to form isolating zones; and
producing the stacked structure comprises etching the initial layer using the isolating zones as a stop to form the assembly and leave behind a remnant of the initial layer above the separating layer and exterior to the assembly, and etching of the remnant of the initial layer and of subjacent portions of separating layer.
20. The process according to claim 17 , wherein encapsulating at least the gain medium comprises covering the stacked structure with an insulating material, forming above the insulating material an etched semiconductor heterostructure forming the gain medium and depositing another insulating layer above the insulating material and the heterostructure to form the second insulating region.